MEMS TUNING FORK GYRO SENSITIVE TO RATE OF ROTATION ABOUT TWO AXES
First Claim
1. A two-axes MEMS gyroscope system comprising:
- two proof masses;
two drive components;
two drive sense components;
four Coriolis sense electrodes, two of the Coriolis sense electrodes are sensitive to in-plane proof mass motion and two of the Coriolis sense electrodes are sensitive to out-of-plane proof mass motion; and
a processing device in signal communication with at least one of the two proof masses, or the four Coriolis sense electrodes, the processing device being configured to determine rate of rotation about two orthogonal axes based on signals received from at least one of the two proof masses, or the four Coriolis sense electrodes.
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Accused Products
Abstract
A two-axes rate sensing MEMS system. The system includes two proof masses, two drive components, two drive sense components, two orthogonal sets of substrate electrodes, and a processing device. The processing device is in signal communication with the two proof masses, the two sense components, or the two sets of substrate electrodes. The processing device determines the rate of rotation about two orthogonal axes based on signals received from the two proof masses, the two sense components, or the two substrate electrodes. Rotation about one axis will induce proofmass motion in the plane of the substrate. Rotation about an orthogonal axis will induce proofmass motion out-of-plane of the proofmasses. The sensing scheme independently detects these proof mass motion, which can infer rate of rotation.
8 Citations
9 Claims
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1. A two-axes MEMS gyroscope system comprising:
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two proof masses; two drive components; two drive sense components; four Coriolis sense electrodes, two of the Coriolis sense electrodes are sensitive to in-plane proof mass motion and two of the Coriolis sense electrodes are sensitive to out-of-plane proof mass motion; and a processing device in signal communication with at least one of the two proof masses, or the four Coriolis sense electrodes, the processing device being configured to determine rate of rotation about two orthogonal axes based on signals received from at least one of the two proof masses, or the four Coriolis sense electrodes. - View Dependent Claims (2, 3, 4, 5)
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6. A method for determining rate of rotation about two orthogonal axes in a single MEMS gyroscope system, the method comprising:
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driving two proof masses to resonate in plane based on a drive signal; receiving signals from at least one of two proof masses, four Coriolis sense electrodes, or two drive sensing electrodes; and determining rate of rotation about two orthogonal axes based on the received signals. - View Dependent Claims (7, 8, 9)
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Specification