METHOD AND STRUCTURE FOR FORMING STRAINED SI FOR CMOS DEVICES
First Claim
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1. A semiconductor device, comprising:
- a semiconductor substrate having at least one gap, extending under a portion of the semiconductor substrate;
a gate stack on the semiconductor substrate; and
a strain layer formed in at least a portion of the at least one gap before the gate stack is formed on the semiconductor substrate,wherein the at least one gap is formed by doping a portion of the semiconductor substrate and then etching the doped portion of the semiconductor substrate.
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Abstract
A semiconductor device includes a semiconductor substrate having at least one gap, extending under a portion of the semiconductor substrate. A gate stack is on the semiconductor substrate. A strain layer is formed in at least a portion of the at least one gap. The strain layer is formed only under at least one of a source region and a drain region of the semiconductor device.
103 Citations
18 Claims
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1. A semiconductor device, comprising:
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a semiconductor substrate having at least one gap, extending under a portion of the semiconductor substrate; a gate stack on the semiconductor substrate; and a strain layer formed in at least a portion of the at least one gap before the gate stack is formed on the semiconductor substrate, wherein the at least one gap is formed by doping a portion of the semiconductor substrate and then etching the doped portion of the semiconductor substrate. - View Dependent Claims (2, 3)
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4. A semiconductor device, comprising:
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a semiconductor substrate; a strain layer arranged in a gap formed in the semiconductor substrate such that at least a portion of the semiconductor substrate extends over the gap; and one of; a gate stack formed on the semiconductor substrate after the strain layer is arranged in the gap; and source and drain regions formed in upper portions of the semiconductor substrate after the strain layer is arranged in the gap. - View Dependent Claims (5, 6)
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7. A semiconductor device, comprising:
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a semiconductor substrate having at least one gap, extending under a portion of the semiconductor substrate; a strain layer formed in at least a portion of the at least one gap, wherein the strain layer is formed only under at least one of a source region and a drain region of the semiconductor device. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification