Mirror device
First Claim
Patent Images
1. A mirror device, comprising:
- an electrode placed on a substrate;
a hinge connected to the electrode having a flat part at an end part of said hinge opposite to the electrode; and
a mirror supported by the hinge and placed on the flat part, whereinsaid flat part of said hinge further includes a protrusion extended fromsaid flat part for placing the mirror thereon.
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Abstract
A mirror device comprises: an electrode placed on a substrate; a hinge which is connected to the electrode and which has a flat part at an end part on a side opposite to the electrode; and a mirror placed on the flat part, wherein a protrusion part formed on the flat part is placed between the flat part and the mirror.
27 Citations
17 Claims
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1. A mirror device, comprising:
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an electrode placed on a substrate; a hinge connected to the electrode having a flat part at an end part of said hinge opposite to the electrode; and a mirror supported by the hinge and placed on the flat part, wherein said flat part of said hinge further includes a protrusion extended from said flat part for placing the mirror thereon. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A mirror device, comprising:
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an electrode placed on a substrate; a mirror placed above the electrode; and a hinge connected to the mirror, wherein a mirror connection part formed between the mirror and hinge is comprised, wherein the mirror connection part is placed at a position offset from the center of a mirror. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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Specification