SUBSTRATE TRANSPORT APPARATUS

• US 20080298944A1
• Filed: 05/08/2008
• Published: 12/04/2008
• Est. Priority Date: 05/08/2007
• Status: Active Grant

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Inventors: Hofmeister, Christopher, Caveney, Robert T.
• Granted Patent: US 8,267,636 B2
• Time in Patent Office: Days
• US Class Current: 414/744.5
• CPC Class Codes: B25J 11/0095 Manipulators transporting wafers
• CPC Class Codes: B25J 18/00 Arms
• CPC Class Codes: B25J 9/106 with articulated links
• CPC Class Codes: B25J 9/126 Rotary actuators
• CPC Class Codes: H01L 21/67742 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: Y10S 414/141 includes means for gripping wafer
• CPC Class Codes: Y10S 901/15 Jointed arm
• CPC Class Codes: Y10S 901/21 Flaccid drive element
• CPC Class Codes: Y10S 901/23 Electric motor
• CPC Class Codes: Y10S 901/27 Arm part
• CPC Class Codes: Y10T 74/20305 Robotic arm
• CPC Class Codes: Y10T 74/20317 including electric motor
• CPC Class Codes: Y10T 74/20329 Joint between elements

Abstract

A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.

Claims

1. A substrate transport apparatus comprising:

a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm;

a second shaftless rotary motor including a second stator and a second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm; and

a first substrate support being coupled to at least one of the first and second arms;

wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.

2. The substrate transport apparatus of claim 1, further comprising a housing wherein the first and second stators are linearly distributed substantially about a periphery of the housing.

3. The substrate transport apparatus of claim 2, wherein the first and second stators are integrated into walls of the housing.

4. The substrate transport apparatus of claim 1, where each of the first and second arms comprises:

a first rotatable arm link having a center of rotation and a distal end; and

a second arm link rotatably coupled to the distal end of the first arm link;

wherein, the first arm links of each of the first and second arms comprises a respective one of the first and second rotors and each of the second arm links of the first and second arms is rotatably coupled to the first substrate support.

5. The substrate transport apparatus of claim 4, wherein the first rotatable arm link of each of the first and second arms comprises a respective one of the first and second rotors in the form of a ring or disk where the distal end is a periphery of the ring or disk.

6. The substrate transport apparatus of claim 5, wherein the ring or disk of each of the first and second arms forms a self bearing motor with a respective one of the first and second stators.

7. The substrate transport apparatus of claim 4, wherein the first rotatable arm link of each of the first and second arms comprises a respective one of the first and second rotors in the form of an elongated link member where the distal end is opposite the center of rotation.

8. The substrate transport apparatus of claim 1, wherein:

the first arm comprises the first rotor, the first arm having a proximate end located at a center of rotation of the first arm;

the second arm comprises the second rotor, the second arm being rotatably coupled at a proximate end to a distal end of the first arm at an elbow joint; and

the first substrate support being rotatably coupled to a distal end of the second arm;

wherein the resultant force is applied to the first and second arms by a respective one of the first and second stators substantially at the elbow joint.

9. The substrate transport apparatus of claim 8, wherein the first substrate support is configured to remain substantially longitudinally aligned with an axis of extension and retraction of the substrate transport apparatus.

10. The substrate transport apparatus of claim 1, further comprising a frame wherein:

the first arm comprises the first rotor, the first arm having a proximate end rotatably coupled on an arm support within the frame and a distal end;

the second rotor having a proximate end rotatably coupled to the arm support and a distal end;

the second arm having a proximate end rotatably coupled to the distal end of the first arm at an elbow joint, the second arm being drivingly coupled to the second rotor; and

the first substrate support being rotatably coupled to a distal end of the second arm;

wherein the resultant force is applied by a respective one of the first and second stators to the first arm substantially at the elbow joint and substantially at the distal end of the second rotor.

11. The substrate transport apparatus of claim 10, wherein the first substrate support is configured to remain substantially longitudinally aligned with an axis of extension/retraction of the substrate transport apparatus.

12. The substrate transport apparatus of claim 1, further comprising:

a third shaftless rotary motor including a third stator and a third rotor, the third stator being linearly distributed and the third rotor being coupled to a third arm;

a fourth shaftless rotary motor including a fourth stator and a fourth rotor, the fourth stator being linearly distributed and the fourth rotor being coupled to a fourth arm, the fourth arm being connected to the third arm; and

a second substrate support being coupled to at least one of the third and fourth arms;

wherein the third stator and fourth stator are configured so that the third and fourth arms and the second substrate support are inside the stators and a motor output at a connection between the third and fourth shaftless rotary motors and a respective one of the third and fourth arms is a resultant force disposed peripheral to the first and second arms.

13. The substrate transport apparatus of claim 12, further comprising a frame wherein the first, second, third and fourth stators are linearly distributed substantially about a periphery of the frame.

14. The substrate transport apparatus of claim 12, where the each of the first, second, third and fourth arms comprises:

a first rotatable arm link having a center of rotation and a distal end; and

a second arm link rotatably coupled to the distal end of the first arm link;

wherein,

the first arm links of each of the first second, third and fourth arms comprises a respective one of the first second, third and fourth rotors,

each of the second arm links of the first and second arms is rotatably coupled to the first substrate support, and

each of the second arm links of the third and fourth arms is rotatably coupled to the second substrate support.

15. The substrate transport apparatus of claim 14, wherein the first rotatable arm link of each of the first second, third and fourth arms comprises a respective one of the first second, third and fourth rotors in the form of a ring or disk where the distal end is a periphery of the ring or disk.

16. The substrate transport apparatus of claim 14, wherein the ring or disk of each of the first second, third and fourth arms forms a self bearing motor with a respective one of the first second, third and fourth stators.

17. The substrate transport apparatus of claim 12, wherein the first rotatable arm link of each of the first second, third and fourth arms comprises a respective one of the first second, third and fourth rotors in the form of an elongated link member where the distal end is opposite the center of rotation.

18. The substrate transport apparatus of claim 12, wherein:

the first arm comprises the first rotor, the first arm having a proximate end located at a center of rotation of the first arm and a distal end;

the second arm comprises the second rotor, the second arm being rotatably coupled at a proximate end to the distal end of the first arm at a first elbow joint;

the first substrate support being rotatably coupled to a distal end of the second arm;

the third arm comprises the third rotor, the third arm having a proximate end located at a center of rotation of the third arm;

the fourth arm comprises the fourth rotor, the fourth arm being rotatably coupled at a proximate end to a distal end of the third arm at a second elbow joint; and

the second substrate support being rotatably coupled to a distal end of the fourth arm;

wherein the resultant force is applied to the first, second, third and fourth arms by a respective one of the first second, third and fourth stators at a respective one of the first and second elbow joint.

19. The substrate transport apparatus of claim 12, further comprising a frame wherein:

the first arm comprises the first rotor, the first arm having a proximate end rotatably coupled on an arm support within the frame;

the second rotor having a proximate end rotatably coupled to the arm support;

the second arm having a proximate end rotatably coupled to a distal end of the first arm at a first elbow joint, the second arm being drivingly coupled to the second rotor;

the first substrate support being rotatably coupled to a distal end of the second arm;

the third arm comprises the third rotor, the third arm having a proximate end rotatably coupled to the arm support;

the fourth rotor having a proximate end rotatably coupled to the arm support;

the fourth arm having a proximate end rotatably coupled to a distal end of the third arm at a second elbow joint, the fourth arm being drivingly coupled to the fourth rotor; and

the second substrate support being rotatably coupled to a distal end of the fourth arm;

wherein the resultant force is applied to the first and second arm substantially at a respective one of the first and second elbow joint and substantially to the distal end of the second and fourth rotor.

20. The substrate transport apparatus of claim 12, wherein the first substrate support and the second substrate support extend and retract in substantially opposite directions.

21. The substrate transport apparatus of claim 12, wherein the first substrate support and the second substrate support extend and retract in substantially the same direction.

22. The substrate transport apparatus of claim 12, where each of the first, second third and fourth arms comprises:

a first rotatable arm link having a center of rotation and a distal end; and

a second arm link rotatably coupled to the distal end of the first arm link;

wherein, the first arm links of each of the first, second third and fourth arms comprises a respective one of the first, second third and fourth rotors, each of the second arm links of the first and second arms is rotatably coupled to the first substrate support and each of the second arm links of the third and fourth arms is rotatably coupled to the second substrate support.

23. The substrate transport apparatus of claim 1, wherein the first and second stators are configured to vertically move the first and second arms.

24. A substrate transport apparatus comprising:

a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm;

a second shaftless rotary motor including a second stator and a second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm; and

a first substrate support being coupled to at least one of the first and second arms;

wherein the first stator and second stator are arranged so that the first stator and second stator substantially surround the first and second arms.

25. A substrate transport apparatus comprising:

a housing;

a first stator linearly distributed substantially along peripheral walls of the housing;

a second stator linearly distributed substantially along the peripheral walls of the housing;

a first substrate transport arm having a center of rotation located within the housing, the first substrate transport arm having an upper arm rotatable about the center of rotation and forming a first rotor,

a forearm rotatably coupled at a first end to the upper arm at a location eccentric to the center of rotation, the forearm forming a second rotor, and

a first substrate support rotatably coupled to a second opposite end of the forearm; and

wherein the first stator and first rotor form a first motor and the second stator and second rotor form a second motor, and the upper arm, forearm and first substrate support are inside the first and second stators and a motor output of the first and second motors at a connection point between the first and second motors and a respective one of the upper arm and forearm is a resultant force disposed peripheral to the upper arm and forearm.

26. The substrate transport apparatus of claim 25, wherein the forearm includes a first forearm member rotatable about the eccentric location and a second forearm member rotatable about the center of rotation, the first forearm member being drivingly coupled to the second forearm member where the resultant force is applied to the second forearm member for effecting rotation of the first forearm member.

27. The substrate transport apparatus of claim 25, further comprising:

a third stator linearly distributed substantially along peripheral walls of the housing;

a fourth stator linearly distributed substantially along the peripheral walls of the housing;

a second substrate transport arm having a center of rotation located within the housing, the second substrate transport arm having

an upper arm rotatable about the center of rotation and forming a third rotor,

a forearm rotatably coupled at a first end to the upper arm at a location eccentric to the center of rotation, the forearm forming a fourth rotor, and

a second substrate support rotatably coupled to a second opposite end of the forearm;

wherein the third stator and third rotor form a third motor and the fourth stator and fourth rotor form a fourth motor, and the upper arm, forearm and second substrate support of the second substrate transport arm are inside the third and fourth stators and a motor output of the third and fourth motors at a connection point between the third and fourth motors and a respective one of the upper arm and forearm is a resultant force disposed peripheral to the respective one of the upper arm and forearm.

28. A substrate transport apparatus comprising:

a housing;

a first stator linearly distributed substantially along peripheral walls of the housing;

a second stator linearly distributed substantially along the peripheral walls of the housing; and

a first substrate transport arm rotatable about a center of rotation located within the housing, the first substrate transport arm having

an upper arm rotatable about the center of rotation and forming a first rotor,

a second rotor rotatably coupled about the center of rotation,

a forearm rotatably coupled at a first end to the upper arm at a location eccentric to the center of rotation and being drivingly coupled to the second rotor, and

a first substrate support rotatably coupled to a second opposite end of the forearm;

wherein the first stator and first rotor form a first motor and the second stator and second rotor form a second motor and the first stator and second stator are configured so that a motor output at a connection between the first and second motors and a respective one of the first and second rotors is a resultant force disposed peripheral to the upper arm.

29. The substrate transport apparatus of claim 28, further comprising:

a third stator linearly distributed substantially along peripheral walls of the housing;

a fourth stator linearly distributed substantially along the peripheral walls of the housing;

a second substrate transport arm rotatable about the center of rotation, the second substrate transport arm having

an upper arm rotatable about the center of rotation and forming a third rotor,

a fourth rotor rotatably coupled about the center of rotation,

a forearm rotatably coupled at a first end to the upper arm at a location eccentric to the center of rotation and being drivingly coupled to the fourth rotor, and

a second substrate support rotatably coupled to a second opposite end of the forearm;

wherein the third stator and third rotor form a third motor and the fourth stator and fourth rotor form a fourth motor and the third stator and fourth stator are configured so that a motor output at a connection between the third and fourth motors and a respective one of the third and fourth rotors is a resultant force disposed peripheral to the upper arm of the second substrate transport arm.

30. The substrate transport apparatus of claim 28, wherein the upper arm comprises a substantial ring shape and forms a self bearing motor with the first stator.

31. The substrate transport apparatus of claim 28, wherein the upper arm comprises an elongated link member rotatably supported by a shaft located at the center of rotation.

32. A substrate transport apparatus comprising:

a frame;

a first stator linearly distributed substantially about a periphery of the frame;

a second stator linearly distributed substantially about the periphery of the frame; and

a first substrate transport arm having,

a first and second rotors rotatable about a center of rotation located within the frame, each of the first and second rotors having a distal end,

a first and second arm links each being rotatably coupled at a first end to a respective distal end of the first and second rotors, and

a first substrate support being rotatably coupled to a respective second end of the first and second arm links;

wherein the first and second stators are configured to apply an resultant force to the first and second rotors where the resultant force is peripheral to the first and second arm links.

33. The substrate transport apparatus of claim 32, further comprising:

a third stator linearly distributed substantially about a periphery of the frame;

a fourth stator linearly distributed substantially about the periphery of the frame;

a second substrate transport arm having,

a third and fourth rotors rotatable about the center of rotation, each of the third and fourth rotors having a distal end,

a third and fourth arm links each being rotatably coupled at a first end to a respective distal end of the third and fourth rotors, and

a second substrate support being rotatably coupled to a respective second end of the third and fourth arm links;

wherein the third and fourth stators are configured to apply an resultant force to the third and fourth rotors where the resultant force is peripheral to the third and fourth arm links.