Advanced finishing control
First Claim
1. A factory for manufacturing a workpiece comprising:
- an at least one finishing apparatus “
A”
for an at least one finishing operation;
an at least one piece of workpiece fabrication machinery “
B”
other than the at least one finishing apparatus “
A”
;
an at least one piece of metrology equipment;
an at least one processor;
an at least one processor readable memory device;
an at least one operative computerized network connecting the at least one processor, the at least one processor readable memory device, the at least one finishing apparatus “
A”
, and the at least one piece of workpiece fabrication machinery “
B”
;
an at least one operative sensor for sensing an in situ finishing information; and
wherein the at least one processor readable memory device includes information in memory comprising (i) at least in part an at least one cost of manufacture model including at least in part an at least one current in-process cost of manufacture information at least in part related to the at least one finishing operation, (ii) the in situ finishing information, (iii) an at least one process model at least in part related to the at least one finishing operation, (iv) an information from the at least one piece of metrology equipment at least in part related to the at least one finishing operation, (v) an information at least in part related to the at least one finishing apparatus “
A”
, and (vi) an information at least in part related to the at least one workpiece fabrication machinery “
B” and
at least in part related to the at least one finishing operation; and
an at least one operative controller for controlling manufacturing operatively connected at least in part to the at least one processor readable memory device.
2 Assignments
0 Petitions
Accused Products
Abstract
A factory, an apparatus, and methods of using an in situ finishing information for finishing workpieces and semiconductor wafers are described. Changes or improvements to cost of manufacture of a workpiece using current in-process cost of manufacture information, tracked current in-process cost of manufacture information, or current cost of manufacture parameters are discussed. Appreciable changes to quality or cost of manufacture of a workpiece using tracking, using in-process tracked information, networks including a multiplicity of apparatus, and using in situ finishing information are discussed. A factory, apparatus, and methods to change or improve process control are discussed. A factory, apparatus, and methods to change or improve real-time process control are discussed. A factory, apparatus, and methods to change or improve feedforward and feedback control are discussed. The workpieces can be tracked individually or by process group such as a process batch.
42 Citations
25 Claims
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1. A factory for manufacturing a workpiece comprising:
-
an at least one finishing apparatus “
A”
for an at least one finishing operation;an at least one piece of workpiece fabrication machinery “
B”
other than the at least one finishing apparatus “
A”
;an at least one piece of metrology equipment; an at least one processor; an at least one processor readable memory device; an at least one operative computerized network connecting the at least one processor, the at least one processor readable memory device, the at least one finishing apparatus “
A”
, and the at least one piece of workpiece fabrication machinery “
B”
;an at least one operative sensor for sensing an in situ finishing information; and wherein the at least one processor readable memory device includes information in memory comprising (i) at least in part an at least one cost of manufacture model including at least in part an at least one current in-process cost of manufacture information at least in part related to the at least one finishing operation, (ii) the in situ finishing information, (iii) an at least one process model at least in part related to the at least one finishing operation, (iv) an information from the at least one piece of metrology equipment at least in part related to the at least one finishing operation, (v) an information at least in part related to the at least one finishing apparatus “
A”
, and (vi) an information at least in part related to the at least one workpiece fabrication machinery “
B” and
at least in part related to the at least one finishing operation; andan at least one operative controller for controlling manufacturing operatively connected at least in part to the at least one processor readable memory device. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for processing a workpiece in a factory, the method comprising:
-
providing i) an at least one finishing apparatus “
A”
for an at least one finishing operation, ii) an at least one piece of workpiece fabrication machinery “
B”
other than the at least one finishing apparatus “
A”
, iii) an at least one piece of metrology equipment, iv) an at least one processor readable memory device, v) an at least one operative computerized network connecting the at least one processor readable memory device, the at least one finishing apparatus “
A”
, the at least one piece of workpiece fabrication machinery “
B”
, and the at least one piece of metrology equipment;finishing the workpiece with the at least one finishing apparatus; sensing an in situ finishing information with an operative sensor; determining a change for a process control parameter using an at least one processor, the at least one operative computerized network, and a family of processing information comprising (i) at least in part an at least one cost of manufacture model including at least in part an at least one current in-process cost of manufacture information, (ii) the in situ finishing information, (iii) an at least one process model at least in part related to the at least one finishing operation, (iv) an information from the at least one piece of metrology equipment at least in part related to the at least one finishing operation, (v) an information at least in part related to the at least one finishing apparatus “
A”
, and (vi) an information at least in part related to the at least one workpiece fabrication machinery “
B” and
at least in part related to the at least one finishing operation; andchanging the process control parameter to change a processing control with an operative controller and wherein the processing control comprises a processing control at least in part related to the at least one finishing operation. - View Dependent Claims (9, 10, 11)
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12. A method for finishing a workpiece in a factory, the method comprising:
-
providing i) an at least one finishing apparatus “
A”
for an at least one finishing operation, ii) an at least one piece of workpiece fabrication machinery “
B”
other than the at least one finishing apparatus “
A”
, iii) an at least one piece of metrology equipment, iv) an at least one processor readable memory device, v) an at least one operative computerized network connecting the at least one processor readable memory device, the at least one finishing apparatus “
A”
, the at least one piece of workpiece fabrication machinery “
B”
, and the at least one piece of metrology equipment;finishing the workpiece with the at least one finishing apparatus; sensing an in situ finishing information with an operative sensor; determining a change for a real-time process control parameter using an at least one processor, the at least one operative computerized network, and a family of processing information comprising (i) at least in part an at least one cost of manufacture model including at least in part an at least one current in-process cost of manufacture information at least in part related to the at least one finishing operation, (ii) the in situ finishing information, (iii) an at least one process model at least in part related to the at least one finishing operation, (iv) an information from the at least one piece of metrology equipment at least in part related to the at least one finishing operation, (v) an information at least in part related to the at least one finishing apparatus “
A”
, and (vi) an information at least in part related to the at least one workpiece fabrication machinery “
B” and
at least in part related to the at least one finishing operation; andchanging the real-time process control parameter to change a real-time processing control with an operative controller and wherein the real-time processing control comprises a real-time processing control at least in part related to the at least one finishing operation. - View Dependent Claims (13)
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14. A method for processing a workpiece, the method comprising:
-
providing a manufacturing process control information for a finishing operation previously used by an at least one processor for an at least one process control and wherein the manufacturing process control information comprises manufacturing process control information at least in part from an operative network including an at least one finishing apparatus “
A”
for an at least one finishing operation, an at least one piece of workpiece fabrication machinery “
B”
other than the at least one finishing apparatus “
A”
, and an at least one piece of metrology equipment and wherein the manufacturing process control information includes information members comprising (i) at least in part an at least one cost of manufacture model including at least in part an at least one current in-process cost of manufacture information at least in part related to the at least one finishing operation, (ii) an in situ finishing information from an operative sensor, (iii) an at least one process model at least in part related to the at least one finishing operation, (iv) an information from the at least one piece of metrology equipment at least in part related to the at least one finishing operation, (v) an information at least in part related to the at least one finishing apparatus “
A”
, and (vi) an information at least in part related to the at least one workpiece fabrication machinery “
B” and
at least in part related to the at least one finishing operation;supplying the manufacturing process control information to an at least one computer; using the at least one computer to determine a change to an at least one information member in the manufacturing process control information; changing the at least one information member in the manufacturing process control information forming a changed manufacturing process control information; and supplying the changed manufacturing process control information for a changed process control for use in an at least one operative controller for controlling a manufacturing operation at least in part related to the at least one finishing operation. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21)
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22. A method for processing a workpiece, the method comprising:
-
providing a manufacturing process control information for a finishing operation previously used by an at least one processor for an at least one real-time process control and wherein the manufacturing process control information comprises manufacturing process control information at least in part from an operative network including an at least one finishing apparatus “
A”
for an at least one finishing operation, an at least one piece of workpiece fabrication machinery “
B”
other than the at least one finishing apparatus “
A”
, and an at least one piece of metrology equipment and wherein the manufacturing process control information includes information members comprising (i) at least in part an at least one cost of manufacture model including at least in part an at least one current in-process cost of manufacture information at least in part related to the at least one finishing operation, (ii) an in situ finishing information from an operative sensor, (iii) an at least one process model, (iv) an information from the at least one piece of metrology equipment at least in part related to the at least one finishing operation, (v) an information at least in part related to the at least one finishing apparatus “
A”
, and (vi) an information at least in part related to the at least one workpiece fabrication machinery “
B” and
at least in part related to the at least one finishing operation;supplying the manufacturing process control information to an at least one computer; using the at least one computer to determine a change to an at least one information member in the manufacturing process control information; changing the at least one information member in the manufacturing process control information forming a changed manufacturing process control information; and supplying the changed manufacturing process control information for a changed real-time process control for use in an at least one operative controller for controlling a manufacturing operation at least in part related to the at least one finishing operation. - View Dependent Claims (23, 24, 25)
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Specification