DETECTION DEVICE, MOVABLE BODY APPARATUS, PATTERN FORMATION APPARATUS AND PATTERN FORMATION METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
First Claim
Patent Images
1. An exposure apparatus that exposes an object held by a movable body with an energy beam, the apparatus comprising:
- an encoder system of which one of a measurement member and a head member is arranged on the movable body and the other of the members is arranged facing the movable body, and which measures positional information of the movable body using a plurality of heads of the head member that f aces the measurement member; and
a detection device that detects information on a surface state of the measurement member.
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Accused Products
Abstract
By irradiating a detection beam from an irradiation system of a detection device to a scale used for measuring the position of a wafer stage, and detecting the detection beam via the scale by a photodetection system, a surface state (an existence state of foreign substance) of the scale is detected. With this operation, detection of the surface state can be performed contactlessly with respect to the scale. Moreover, movement control of the wafer stage can be performed with high precision by taking the surface state into consideration.
82 Citations
94 Claims
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1. An exposure apparatus that exposes an object held by a movable body with an energy beam, the apparatus comprising:
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an encoder system of which one of a measurement member and a head member is arranged on the movable body and the other of the members is arranged facing the movable body, and which measures positional information of the movable body using a plurality of heads of the head member that f aces the measurement member; and a detection device that detects information on a surface state of the measurement member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An exposure method of exposing an object held by a movable body with an energy beam, the method comprising:
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a measurement process of measuring positional information of the movable body, using an encoder system of which one of a measurement member and a head member is arranged on the movable body and the other of the members is arranged facing the movable body, and which measures the positional information using a plurality of heads of the head member that faces the measurement member; and a detection process of detecting information on a surface state of the measurement member using a detection device. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A detection device that detects a surface state of a measurement member which is arranged on a movable body and to which a measurement beam used for measurement of positional information of the movable body in a predetermined direction is irradiated, the detection device comprising:
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an irradiation system that irradiates a light beam to the measurement member; and a detection system that detects the light beam via the measurement member. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47)
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48. A movable body apparatus, comprising:
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a movable body on which a measurement member is arranged; a measurement device that has a head that irradiates a measurement beam to the measurement member when facing the measurement member and receives the measurement beam via the measurement member, and measures positional information of the movable body in a predetermined direction by the head; and a detection device that detects a surface state of the measurement member. - View Dependent Claims (49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74)
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75. A movable body apparatus, comprising:
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a movable body that moves within a predetermined plane, holding an object mounted on the movable body; a measurement device that has a head that faces one surface of the movable body on which the object is mounted and which is parallel to the plane, and measures positional information of the movable body in a predetermined direction by the head irradiating a measurement beam to an area other than a mounting area of the object on the one surface of the movable body; and a detection device that detects a surface state of the area other than the mounting area of the object on the one surface of the movable body. - View Dependent Claims (76, 77)
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78. A pattern formation method, comprising:
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a pattern formation process of forming a pattern on an object held by a movable body; and a detection process of detecting a surface state of a measurement member which is arranged on the movable body and to which a measurement beam used for measurement of positional information of the movable body in a predetermined direction is irradiated. - View Dependent Claims (79, 80, 81, 82, 83, 84, 85, 86, 87, 88)
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89. A pattern formation method, comprising:
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a pattern formation process of forming a pattern on an object held by a movable body; and a foreign substance removal process of removing a foreign substance existing on a surface of the measurement member which is arranged on the movable body and to which a measurement beam used for measurement of positional information of the movable body in a predetermined direction is irradiated. - View Dependent Claims (90, 91, 92, 93, 94)
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Specification