ELECTROSTATIC DISCHARGE DEVICE

• US 20090009917A1
• Filed: 07/01/2008
• Published: 01/08/2009
• Est. Priority Date: 07/03/2007
• Status: Active Grant

• Current Assignee: Hynix Semiconductor Incorporated (SK Hynix Inc.)
• Original Assignee: Hynix Semiconductor Incorporated (SK Hynix Inc.)
• Inventors: Moon, Jung Eon
• Granted Patent: US 7,733,618 B2
• Time in Patent Office: Days
• US Class Current: 361/56
• CPC Class Codes: H01L 23/60 Protection against electrostatic charges or discharges, e.g. Faraday shields
• CPC Class Codes: H01L 27/0266 using field effect transistors as protective elements
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

An electrostatic discharge device includes a first protection element including a MOS transistor type first diode, which provides a first capacitor including a first insulation layer, and provides a first path between an input/output pad and a power supply voltage line using the first diode, for discharging static electricity, a second protection element providing a second path between the input/output pad and a ground voltage line for discharging the static electricity, a trigger circuit including a resistor that is connected in series to the first capacitor, and a power clamp element providing a third path for discharging the static electricity between the power supply voltage line and the ground voltage line by a voltage applied to the resistor.

Claims

1. An electrostatic discharge device, comprising:

an input/output pad;

a power supply voltage line;

a ground voltage line;

a first protection element including a MOS transistor diode and an insulation layer that includes a gate electrode, the first protection element configured to provide a first path between the input/output pad and the power supply voltage line for discharging static electricity;

a second protection element configured to provide a second path between the input/output pad and the ground voltage line for discharging the static electricity;

a trigger circuit including a resistor connected in series to the gate electrode formed in the insulation layer in the first protection element, the trigger circuit configured to transmit a voltage in response to static electricity; and

a power clamp element coupled with the trigger circuit element, the power clamp element configured to switch the power supply voltage line and the ground voltage line based on the voltage transmitted from the trigger circuit in response to the static electricity, thereby providing a third path for discharging the static electricity.

2. The electrostatic discharge device according to claim 1, wherein the first protection element further comprises an N-well, an N-type junction area formed over the N-well and connected to the power supply voltage line, a P-type junction area formed over the N-well and connected to the input/output pad, and wherein the insulation layer and the gate electrode are deposited over the N-well between the N-type junction area and the P-type junction area.

3. The electrostatic discharge device according to claim 1, wherein the second protection element comprises a P-well, an N-type junction area formed over the P-well and connected to the input/output pad, a P-type junction area formed over the P-well and connected to the ground voltage line, and an insulation layer and a gate electrode deposited over the P-well between the N-type junction area and the P-type junction area.

4. The electrostatic discharge device according to claim 1, wherein the second protection element comprises an N-well, an N-type junction area formed over the N-well and connected to the input/output pad, a P-type junction area formed over the N-well and connected to the ground voltage line, and an insulation layer and a gate electrode which are deposited over the N-well between the N-type junction area and the P-type junction area.

5. An electrostatic discharge device comprising:

an input/output pad;

a power supply voltage line;

a ground voltage line;

a first protection element including a MOS transistor first diode comprising a first capacitor including a first insulation layer, the first protection element configured to provide a first path for discharging static electricity between the input/output pad and the power supply voltage line using the first diode;

a second protection element configured to provide a second path for discharging the static electricity between the input/output pad and the ground voltage line;

a trigger circuit including a resistor connected in series to the first capacitor; and

a power clamp element configured to provide a third path for discharging the static electricity between the power supply voltage line and the ground voltage line based on a voltage applied to the resistor.

6. The electrostatic discharge device according to claim 5, wherein the first diode includes an N-well connected to the power supply voltage line, and a P-type junction area formed over the N-well and connected to the input/output pad, and wherein the first capacitor includes the N-well, the first insulation layer deposited over the N-well, and a gate electrode.

7. The electrostatic discharge device according to claim 6, wherein the N-well is connected to the power supply voltage line by an N-type junction area.

8. The electrostatic discharge device according to claim 5, wherein the second protection element comprises:

a second diode that includes a P-well connected to the ground voltage line and an N-type junction area formed over the P-well and connected to the input/output pad; and

a second capacitor including the P-well, a second insulation layer deposited over the P-well, and a gate electrode, the gate electrode being in an electrically floating state.

9. The electrostatic discharge device according to claim 8, wherein the P-well is connected to the ground voltage line by a P-type junction area.