Electronic device and method of matching the impedance thereof

• US 20090015346A1
• Filed: 06/06/2008
• Published: 01/15/2009
• Est. Priority Date: 06/05/2002
• Status: Active Grant

• Current Assignee: NXP B.V. (NXP Semiconductors NV)
• Original Assignee: NXP B.V. (NXP Semiconductors NV)
• Inventors: Van Delden, Martinus Hermanus Wilhelmus Maria
• Granted Patent: US 7,893,790 B2
• Time in Patent Office: Days
• US Class Current: 333/101
• CPC Class Codes: H01H 59/0009 making use of micromechanics
• CPC Class Codes: H03F 1/56 Modifications of input or output impedances, not otherwise provided for
• CPC Class Codes: H03F 2200/294 the amplifier being a low noise amplifier [LNA]

Abstract

An electronic device includes a first and a second micro-electromechanical switch assembly on a substrate, between which first and second switch assembly a first line having a first impedance and a second line having a second impedance are present. The first switch assembly includes an input terminal and a first and a second output terminal connected to the first and the second line, respectively. The second switch assembly includes an output terminal and a first and second input terminal connected to the first and second line, respectively.

Claims

1. An electronic device provided with a first and a second micro-electromechanical switch assembly on a substrate, between which first and second switch assembly a first line having a first impedance and a second line having a second impedance are present, the first switch assembly being provided with an input terminal and a first and a second output terminal connected to the first and the second line respectively, and the second switch assembly being provided with an output terminal and with a first and second input terminal connected to the first and second line respectively,

wherein the first and second switch assemblies are each arranged to, in one switching condition thereof, connect the input terminal of the first switch assembly to only one of the first and second output terminals of the first switch assembly, and to connect only one of the first and second input terminals of the second switch assembly to the output terminal of the second switch assembly;

and

wherein the first and second switch assemblies are arranged to, in another switching condition thereof, connect the input terminal of the first switch assembly to both of the first and second output terminals of the first switch assembly, and to connect both of the first and second output terminals and the second switch assembly to the output terminal of the second switch assembly.

2. An electronic device as claimed in claim 1, wherein the first line comprise an inductor turn.

3. An electronic device as claimed in claim 2, wherein the second line is an interconnect, and a further inductor turn is connected to the output terminal of the second switch assembly, therewith providing a step-wise tunable inductor.

4. An electronic device as claimed in claim 2, wherein the second line comprises an inductor turn of different length than the indictor turn of the first line, therewith providing a step-wise tunable inductor.

5. An electronic device as claimed in claim 1, wherein the first and second line each comprise a thin-film capacitor.

6. An electronic device as claimed in claim 1, wherein in the first switch assembly the input terminal is connected to a fixed electrode;

the output terminals are provided as a first and second movable electrode respectively, each of which movable electrodes is movable between a first position in which it is separated from the fixed electrode through an airgap, and a second position in which it is at least substantially in physical contact with the fixed electrode, and a first and a second control structure are present, with which the first and second movable electrodes are movable towards or away from the fixed electrode through application of a control voltage.

7. An electronic device as claimed in claim 6, wherein the first and second control structure have a first and a second electrodes, which second electrodes of the first and second control structure are mechanically connected with but electrically isolated from the first and second movable electrode respectively, such that a displacement of a second electrode moves the corresponding movable electrode towards or away from the fixed electrode, which second electrode is displaceable by application of a voltage difference between the first and second electrode of the control structure.

8. An electronic device as claimed in claim 7, wherein at least partially electrically insulating cantilever arms connect the second electrodes of the control structures and the movable electrodes, which cantilever arms have the movable electrodes at a first end and have a common support structure at a second opposite end.

9. An electronic device as claimed in claim 8, wherein the second electrodes of the control structures are electrically connected to one ground plane, which is at least partially present in the support structure.

10. An electronic device as claimed in claim 1, wherein the input terminal is connected to a signal line through a vertical interconnect, the signal line being present in a second metal layer in which the movable electrodes are present as well.

11. An electronic device as claimed in claim 3, wherein the step-wise tuneable inductor structure is part of an impedance matching network, further comprising a micro-electromechanical capacitor.

12. A mobile telecommunication apparatus comprising the electronic dec vice according to claim 1.

13. (canceled)