MICROELECTRONIC PRESSURE SENSOR
First Claim
Patent Images
1. A microelectronic pressure sensor, comprising:
- a substrate;
a MOSFET transistor having a mobile gate and a cavity between said mobile gate and the substrate; and
a gate actuator structured to move said mobile gate in response to a pressure.
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Abstract
A microelectronic pressure sensor comprises a MOSFET transistor adapted with a mobile gate and a cavity between the mobile gate and a substrate. The sensor includes a gate actuator configured to move mobile gate in response to a pressure being exercised. A fingerprint recognition system includes a matrix of such sensors.
57 Citations
25 Claims
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1. A microelectronic pressure sensor, comprising:
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a substrate; a MOSFET transistor having a mobile gate and a cavity between said mobile gate and the substrate; and a gate actuator structured to move said mobile gate in response to a pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A process, comprising:
measuring relief of a surface of a body, the measuring including; moving mobiles gates of MOSFET transistors in response to pressure which is locally exercised on a surface of a gate actuator by the surface of the body; and converting the movement of the mobile gates into electrical quantities corresponding to relative distances between the mobile gates and a substrate. - View Dependent Claims (14, 15, 16, 17)
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18. A process for manufacturing a microelectronic pressure sensor, comprising:
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providing a substrate; forming a MOSFET transistor having a mobile gate and a cavity between said mobile gate and the substrate; and forming a gate actuator structured to move said mobile gate in response to a pressure. - View Dependent Claims (19, 20, 21)
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22. A flat display system, comprising:
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a matrix arranged in rows and columns and including pixels at crossings of the rows and columns, respectively; and an arrangement of microelectronic pressure sensors formed on a substrate, each microelectronic pressure sensor including; a MOSFET transistor with a mobile gate and a cavity between said mobile gate and the substrate, and a gate actuator structured to move the mobile gate in response to the application of a pressure. - View Dependent Claims (23, 24, 25)
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Specification