ULTRASONIC TRANSDUCER, METHOD OF MANUFACTURING ULTRASONIC TRANSDUCER, ULTRASONIC DIAGNOSTIC APPARATUS, AND ULTRASONIC MICROSCOPE
First Claim
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1. An ultrasonic transducer comprising:
- a transducer cell including;
a first electrode;
a vibration membrane disposed on the first electrode, separated by an air gap portion; and
a second electrode supported by the vibration membrane;
a first conductive layer electrically connected to the first electrode;
a second conductive layer disposed facing the first conductive layer and electrically connected to the second electrode;
an electret for retaining a charge and applying a predetermined potential difference between the first electrode and the second electrode, the electret being disposed in a region between the first conductive layer and the second conductive layer, where at least a part of the electret do not overlap with the transducer cell when viewed from a transmitting direction of ultrasonic waves generated by vibration of the vibration membrane.
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Abstract
A ultrasonic transducer of the invention comprises: a transducer cell including a first electrode and a second electrode disposed separated from the first electrode by an air gap portion; and an electret for applying a potential difference between the first electrode and the second electrode. The electret is disposed in a region where at least a part thereof does not overlap with the transducer cell when viewed from a transmitting direction of ultrasonic waves.
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Citations
17 Claims
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1. An ultrasonic transducer comprising:
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a transducer cell including;
a first electrode;
a vibration membrane disposed on the first electrode, separated by an air gap portion; and
a second electrode supported by the vibration membrane;a first conductive layer electrically connected to the first electrode; a second conductive layer disposed facing the first conductive layer and electrically connected to the second electrode; an electret for retaining a charge and applying a predetermined potential difference between the first electrode and the second electrode, the electret being disposed in a region between the first conductive layer and the second conductive layer, where at least a part of the electret do not overlap with the transducer cell when viewed from a transmitting direction of ultrasonic waves generated by vibration of the vibration membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of manufacturing an ultrasonic transducer, the ultrasonic transducer including:
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a transducer cell having a first electrode formed on a substrate, a vibration membrane disposed on the first electrode, separated by an air gap portion, and a second electrode supported by the vibration membrane; and an electret made of an organic film for retaining a charge and applying a predetermined potential difference between the first electrode and the second electrode, the method of manufacturing the ultrasonic transducer comprising; a process of forming the transducer cell on the substrate; a process of forming a first conductive layer electrically connected to the first electrode of the transducer cell, and extended in a region not overlapping with the transducer cell on the substrate; a process of forming the electret independently of the processes of forming the transducer cell and the first conductive layer; a process of attaching the electret on the first conductive layer in a region on the substrate which does not overlap with the transducer cell. a process of forming a second conductive layer on a surface of the electret which is on an opposite side of a surface facing the first conductive layer; and a process of electrically connecting the second conductive layer with the second electrode. - View Dependent Claims (17)
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Specification