TREATMENT DEVICE, TREATMENT DEVICE CONSUMABLE PARTS MANAGEMENT METHOD, TREATMENT SYSTEM, AND TREATMENT SYSTEM CONSUMABLE PARTS MANAGEMENT METHOD

  • US 20090078196A1
  • Filed: 01/19/2006
  • Published: 03/26/2009
  • Est. Priority Date: 03/14/2005
  • Status: Active Grant
First Claim
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1. A processing apparatus capable of executing a plurality of types of processing under different processing conditions inside a processing chamber in which consumable components are disposed, comprising:

  • a measuring means for measuring a utilization status of a consumable component in correspondence to each type of processing executed in said processing chamber;

    a storage means for storing wear coefficient information indicating wear coefficients each indicating a wear extent change rate determined in advance for said consumable component in correspondence to a specific type of processing among the plurality of types of processing executed in said processing chamber; and

    a control unit that obtains utilization statuses corresponding to the individual types of processing, having been measured by said measuring means, obtains said wear coefficients corresponding to the individual types of processing indicated in said wear coefficients information stored in said storage means, calculates a wear index value for said consumable component based upon said utilization statuses corresponding to the individual types of processing and the wear coefficient corresponding to the individual types of processing and executes management processing to manage said consumable component based upon said calculated wear index value.

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