APPARATUS AND METHOD OF SENSING LEAKAGE OF CHEMICAL LIQUID
First Claim
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1. An apparatus for sensing leakage of chemical liquid, comprising:
- a sensing unit measuring a flow rate of chemical liquid being supplied to a process chamber;
a process control unit judging whether leakage of the chemical liquid has occurred using the measured flow rate of the chemical liquid and generating a control signal; and
an equipment control unit receiving an input of the control signal and controlling an operation of equipment.
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Abstract
An apparatus and method of sensing leakage of chemical liquid is provided. The apparatus for sensing leakage of chemical liquid, includes a sensing unit measuring a flow rate of chemical liquid being supplied to a process chamber, a process control unit judging whether leakage of the chemical liquid has occurred using the measured flow rate of the chemical liquid and generating a control signal, and an equipment control unit receiving an input of the control signal and controlling an operation of equipment.
8 Citations
18 Claims
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1. An apparatus for sensing leakage of chemical liquid, comprising:
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a sensing unit measuring a flow rate of chemical liquid being supplied to a process chamber; a process control unit judging whether leakage of the chemical liquid has occurred using the measured flow rate of the chemical liquid and generating a control signal; and an equipment control unit receiving an input of the control signal and controlling an operation of equipment. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of sensing leakage of chemical liquid, comprising:
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measuring a flow rate of chemical liquid being supplied to a process chamber; judging whether leakage of the chemical liquid has occurred using the measured flow rate of the chemical liquid; generating a control signal depending on whether the leakage of the chemical liquid has occurred; and receiving an input of the control signal and controlling an operation of equipment. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification