MOVEABLE MICRO-ELECTROMECHANICAL DEVICE

• US 20090135463A1
• Filed: 01/30/2009
• Published: 05/28/2009
• Est. Priority Date: 04/08/1998
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Miles, Mark W.
• Granted Patent: US 7,791,787 B2
• Time in Patent Office: Days
• US Class Current: 359/290
• CPC Class Codes: G02B 19/0019 having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors)
• CPC Class Codes: G02B 26/00 Optical devices or arrangements for the control of light using movable or deformable optical elements control of light by modification of the optical properties of the media of the elements involved therein G02F1/00
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/007 the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/06 for controlling the phase of light G02B26/08 takes precedence , measuring optical phase difference G01J9/00
• CPC Class Codes: G02B 26/0816 by means of one or more reflecting elements
• CPC Class Codes: G02B 26/0825 the reflecting element being a flexible sheet or membrane, e.g. for varying the focus flexible mirrors for cosmetic use A45D42/24
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 27/0068 having means for controlling the degree of correction, e.g. using phase modulators, movable elements controlling the phase of light using moving or deformable elements G02B26/06
• CPC Class Codes: G02B 5/201 in the form of arrays
• CPC Class Codes: G02F 1/0128 based on electro-mechanical, magneto-mechanical, elasto-optic effects
• CPC Class Codes: G02F 2203/12 spatial light modulator
• CPC Class Codes: G09G 2300/0426 Layout of electrodes and connections
• CPC Class Codes: G09G 2300/0469 Details of the physics of pixel operation
• CPC Class Codes: G09G 2300/08 Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
• CPC Class Codes: G09G 2300/0809 Several active elements per pixel in active matrix panels
• CPC Class Codes: G09G 2300/0842 forming a memory circuit, e.g. a dynamic memory with one capacitor
• CPC Class Codes: G09G 2300/088 using a non-linear two-terminal element
• CPC Class Codes: G09G 3/2014 : by modulation of the duration of a single pulse during which the logic level remains constant
• CPC Class Codes: G09G 3/22 : using controlled light sources
• CPC Class Codes: G09G 3/3433 : using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices using liquid crystal devices G09G3/36; using electrochromic devices G09G3/38
• CPC Class Codes: G09G 3/3466 : based on interferometric effect
• CPC Class Codes: Y10T 29/49002 : Electrical device making
• CPC Class Codes: Y10T 29/4913 : Assembling to base an electrical component, e.g., capacitor, etc.

Abstract

A MEMS device is provided. The MEMS device may include a first plate, a second plate and a third plate. The MEMS device may also include a first power supply configured to provide a voltage to the first plate and a second power supply configured apply a voltage to the second plate. In some embodiments, a third power supply may provide a voltage to the third plate.

Claims

1. A pixel device, comprising:

a first plate, a second plate disposed under the first plate wherein the second plate and the first plate include bumps, and a third plate disposed under the second plate;

a first power supply for providing a first voltage to the first plate;

a second power supply for providing a second voltage to the second plate; and

a third power supply for providing a third voltage to the third plate.

2. The device as defined in claim 1, wherein the device is a DLD (diffractive light device) MEMS (microelectromechanical system) device.

3. The device as defined in claim 1, wherein the second voltage comprises a variable signal voltage.

4. The device as defined in claim 3, wherein the variable signal voltage modulates the position of the second plate.

5. The device as defined in claim 1, wherein the first power supply is operated so that the first plate is one of positively biased or negatively biased relative to the second plate and the third power supply is operated so that the third plate is the other of the positively biased or negatively biased relative to the second plate.

6. The device as defined in claim 1, wherein the second plate is movable, and the first plate and the third plate are substantially stationary.

7. The device as defined in claim 1, wherein the second plate is closer to the first plate than the third plate.

8. The device as defined in claim 1, wherein the second plate is closer to the third plate than the first plate.

9. The device as defined in claim 1, wherein the second plate is equidistant between the first plate and the third plate.

10. The device as defined in claim 1, wherein the second plate is supported by flexures.

11. The device as defined in claim 1, wherein the second plate is reflective and the first plate is semi-transparent.

12. The device as defined in claim 1, wherein the second plate and the first plate comprise non-conductive bumps located on their bottom surfaces.

13. The device as defined in claim 1, wherein the non-conductive bumps comprise silicon-di-oxide.

14. The device as defined in claim 1, wherein the first plate, the second plate and the third plate are energized in a sequence.

15. The device as defined in claim 14, wherein a distance between the first plate and the second plate is greater than a distance between the third plate and the second plate and wherein the sequence comprises the first plate is biased first.

16. The device as defined in claim 14, wherein a distance between the third plate and the second plate is greater than a distance between the first plate and the second plate and wherein the sequence comprises the third plate is biased first.

17. A method for operating a pixel device, comprising:

providing a first plate, a second plate disposed under the first plate wherein the second plate and the first plate include bumps, and a third plate disposed under the second plate; and

energizing the first plate, the second plate, and the third plate in a sequence.

18. The method as defined in claim 17, wherein a distance between the first plate and the second plate is greater than a distance between the third plate and the second plate and wherein the sequence comprises the first plate is biased first.

19. The method as defined in claim 17, wherein a distance between the third plate and the second plate is greater than a distance between the first plate and the second plate and wherein the sequence comprises the third plate is biased first.

20. A pixel device, comprising:

a first plate, a second plate disposed under the first plate, wherein the second plate and the first plate include means for preventing shorting, and a third plate disposed under the second plate;

first power supply means for providing a first voltage to the first plate;

second power supply means for providing a second voltage to the second plate; and

third power supply means for providing a third voltage to the third plate.

21. The device as defined in claim 20, wherein the second power supply means for providing a second voltage to the second plate comprises a variable signal voltage means for modulating a position of the second plate.

22. The device as defined in claim 20, wherein the first power supply means for providing a first voltage to the first plate comprises a positive or negative bias means for biasing the first plate relative to the second plate and wherein the third power supply means for providing a third voltage to the third plate comprises the other of a positive or negative bias means for biasing the third plate relative to the second plate.