Method For The Wet-Chemical Treatment Of A Semiconductor Wafer
First Claim
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1. A method for the individual wet-chemical treatment of a semiconductor wafer, comprising:
- a) rotating a semiconductor wafer;
b) applying a cleaning liquid comprising gas bubbles having a diameter of 100 μ
m or less to the rotating semiconductor wafer, such that a liquid film forms on the semiconductor wafer;
c) exposing the rotating semiconductor wafer and liquid film to a gas atmosphere containing a reactive gas; and
d) removing the liquid film.
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Abstract
A method for the wet-chemical treatment of a semiconductor wafer involves: a) rotating a semiconductor wafer; b) applying a cleaning liquid comprising gas bubbles having a diameter of 100 μm or less to the rotating wafer such that a liquid film forms on the wafer; c) exposing the rotating semiconductor wafer to a gas atmosphere containing a reactive gas; and d) removing the liquid film from the wafer.
20 Citations
17 Claims
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1. A method for the individual wet-chemical treatment of a semiconductor wafer, comprising:
- a) rotating a semiconductor wafer;
b) applying a cleaning liquid comprising gas bubbles having a diameter of 100 μ
m or less to the rotating semiconductor wafer, such that a liquid film forms on the semiconductor wafer;
c) exposing the rotating semiconductor wafer and liquid film to a gas atmosphere containing a reactive gas; and
d) removing the liquid film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
- a) rotating a semiconductor wafer;
Specification