Micro mirror device
First Claim
Patent Images
1. A mirror device, comprising:
- an electrode placed on a substrate;
a memory circuit connected to the electrode;
an elastic hinge disposed near said electrode and extending from said substrate for supporting a mirror above said electrode wherein said elastic hinge having a negative temperature coefficient of resistance.
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Abstract
The present invention provides a mirror device, comprising: an electrode placed on a substrate; a memory circuit connected to the electrode; an elastic hinge disposed near said electrode and extending from said substrate for supporting a mirror above said electrode wherein said elastic hinge having a negative temperature coefficient of resistance.
14 Citations
12 Claims
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1. A mirror device, comprising:
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an electrode placed on a substrate; a memory circuit connected to the electrode; an elastic hinge disposed near said electrode and extending from said substrate for supporting a mirror above said electrode wherein said elastic hinge having a negative temperature coefficient of resistance. - View Dependent Claims (2, 3, 4, 5, 6, 12)
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7. A mirror device, comprising:
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a stationary electrode disposed on a substrate; a movable electrode disposed at a distance away from the stationary electrode; an elastic hinge extended from said substrate for supporting the movable electrode; and a drive circuit for applying adjustable voltages to the stationary electrode or movable electrode to control the movable electrode, wherein the drive circuit controls the movable electrode to operate with a time sequence depending on an electric resistance of the elastic hinge. - View Dependent Claims (8, 9, 10)
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11. A mirror device, comprising:
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a plurality of electrodes placed on a substrate; a mirror placed at a distance away from the electrode; and an elastic hinge disposed between the mirror and electrode, wherein the elastic hinge has a smaller resistance in an operational temperature or operating the mirror device than a normal ambient temperature.
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Specification