CONTROLLED FLUID DELIVERY IN A MICROELECTRONIC PACKAGE

• US 20090169427A1
• Filed: 12/28/2007
• Published: 07/02/2009
• Est. Priority Date: 12/28/2007
• Status: Active Grant

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Matayabas, James C. JR., Supriya, Lakshmi, Chakrapani, Nirupama
• Granted Patent: US 9,101,931 B2
• Time in Patent Office: Days
• US Class Current: 422/68.100
• CPC Class Codes: B01J 2219/00527 Sheets
• CPC Class Codes: B01J 2219/00605 the compounds being directly bound or immobilised to solid supports
• CPC Class Codes: B01J 2219/00619 using hydrophilic or hydrophobic regions
• CPC Class Codes: B01L 2200/025 Align devices or objects to ensure defined positions relative to each other
• CPC Class Codes: B01L 2200/027 for microfluidic devices
• CPC Class Codes: B01L 2200/0605 Metering of fluids
• CPC Class Codes: B01L 2200/10 Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
• CPC Class Codes: B01L 2300/046 Function or devices integrated in the closure
• CPC Class Codes: B01L 2300/0627 Sensor or part of a sensor is integrated
• CPC Class Codes: B01L 2300/0816 Cards, e.g. flat sample carriers usually with flow in two horizontal directions
• CPC Class Codes: B01L 2300/0819 Microarrays; Biochips
• CPC Class Codes: B01L 2300/0822 Slides
• CPC Class Codes: B01L 2300/0867 Multiple inlets and one sample wells, e.g. mixing, dilution
• CPC Class Codes: B01L 2300/089 Virtual walls for guiding liquids
• CPC Class Codes: B01L 2300/16 Surface properties and coatings
• CPC Class Codes: B01L 2300/161 Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
• CPC Class Codes: B01L 2300/165 Specific details about hydrophobic, oleophobic surfaces
• CPC Class Codes: B01L 2400/0406 capillary forces
• CPC Class Codes: B01L 2400/0688 surface tension valves, capillary stop, capillary break
• CPC Class Codes: B01L 3/502707 characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/502715 : characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
• CPC Class Codes: B05D 3/12 : by mechanical means
• CPC Class Codes: B05D 5/00 : Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures

Abstract

A microelectronic package includes a die which may include MEMS and CMOS circuitry for analyzing a fluid. A defined path is provided for channeling fluid to the die. Rather than patterning depressions or physical channels in the package substrate, the defined paths comprise coatings that may channel the flow of liquids to the die for biological sensor type applications. The defined paths may comprise a wetting coating that has an affinity to fluids. Similarly, the defined paths may comprise a dewetting coating the tend to repel fluid surrounding the paths.

Claims

1. An apparatus, comprising:

a substrate having a die positioned thereon for processing fluids;

a coating patterned on the substrate defining a fluid flow path;

a cover fit over the substrate;

a coating patterned on the cover corresponding to the coating patterned on the substrate; and

a spacer between the substrate and the cover, wherein the fluid flow path defines a path for carrying the fluids to the die.

2. An apparatus as recited in claim 1 wherein the coating comprises a wetting coating within the fluid flow path.

3. The apparatus as recited in claim 2 wherein the wetting coating comprises nanoparticles including silica or titania.

4. The apparatus as recited in claim 2 wherein the wetting coating comprises functionalized nanoparticles including any of silica or titania in epoxy resin.

5. The apparatus as recited in claim 2 wherein the wetting coatings comprise silanes with hydrophilic end groups including any of carboxylic acid or hydroxyl.

6. The apparatus as recited in claim 1 wherein the coating comprises a dewetting coating surrounding the fluid flow path.

7. The apparatus as recited in claim 6 wherein the dewetting coating comprises one of alkoxysilanes and alkanethiolates.

8. The apparatus as recited in claim 7 wherein the alsoxysilanes comprise any of octadecyltrichlorosilane, heptadecafluoro 1,1,2,2, tetrahydrodecyl trichlorosilane.

9. The apparatus as recited in claim 7 wherein the alkanethiolates comprise n-alkanethiol.

10. The apparatus as recited in claim 1 wherein the cover is transparent to light.

11. The apparatus as recited in claim 10, wherein the cover comprises one of clear quartz, polyester, polycarbonate, or poly(methyl methacrylate).

12. A method for forming virtual fluidic channels on a substrate to channel a fluid to a die, comprising:

providing a die on a substrate, the die including one or more fluidic circuits;

patterning a coating on the substrate to define a fluid path from an edge of the substrate to the die;

patterning a coating on a cover corresponding to the fluid flow path;

positioning a spacer on the substrate; and

placing the cover over the substrate and the spacer, wherein the coatings define a virtual fluidic path to channel a fluid to the die.

13. The method as recited in claim 12 wherein the patterning comprises stamping the substrate and the cover with a stamp having the coating thereon.

14. The method as recited in claim 12 wherein the coating comprises a wetting coating within the fluid flow path.

15. The method as recited in claim 14 wetting coating comprises nanoparticles including silica or titania.

16. The method as recited in claim 14 comprises a dewetting coating surrounding the fluid flow path.

17. The method as recited in claim 14 wherein the dewetting coating comprises one of alkoxysilanes and alkanethiolates.

18. A system comprising:

a substrate having a die positioned thereon including CMOS and MEMS circuits for processing biological fluids;

a cover over the substrate; and

a virtual fluid path comprising one of a wetting or dewetting coating patterned on the substrate and the cover for channeling the biological fluids from an inlet on an edge of the substrate to the die.

19. The system as recited in claim 18 wherein the wetting coating comprises nanoparticles including silica or titania within the fluid path.

20. The system as recited in claim 18 wherein the dewetting comprises one of alkoxysilanes and alkanethiolates surrounding the fluid path.