DUAL MODE SENSING FOR VIBRATORY GYROSCOPE
First Claim
1. An angular rate sensor comprisinga substrate;
- a drive subsystem partially supported by the substrate with at least one spring, at least one anchor; and
at least one mass; and
at least one mass of the drive subsystem is oscillated by at least one actuator along a first axis; and
Coriolis force acting on the drive subsystem along a second axis in response to angular velocity of the substrate around the third axis;
a sense subsystem partially supported by the substrate with at least one spring, at least one anchor; and
at least one mass;
wherein the sense subsystem moves along or around the fourth axis; and
motion of the sense subsystem can be sensed by a transducer and is proportional to the rate of rotation of the substrate about a third axis; and
at least one flexible coupling between the drive subsystem and the sense subsystem.
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Abstract
An angular rate sensor is disclosed. The angular rate sensor comprises a substrate and a drive subsystem partially supported by a substrate. The drive subsystem includes at least one spring, at least one anchor, and at least one mass; the at least one mass of the drive subsystem is oscillated by at least one actuator along a first axis. Coriolis force acts on moving the drive subsystem along or around a second axis in response to angular velocity of the substrate around the third axis. The angular rate sensor also includes a sense subsystem partially supported by a substrate. The sense subsystem includes at least one spring, at least one anchor, and at least one mass.
114 Citations
13 Claims
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1. An angular rate sensor comprising
a substrate; -
a drive subsystem partially supported by the substrate with at least one spring, at least one anchor; and
at least one mass; and
at least one mass of the drive subsystem is oscillated by at least one actuator along a first axis; and
Coriolis force acting on the drive subsystem along a second axis in response to angular velocity of the substrate around the third axis;a sense subsystem partially supported by the substrate with at least one spring, at least one anchor; and
at least one mass;
wherein the sense subsystem moves along or around the fourth axis; and
motion of the sense subsystem can be sensed by a transducer and is proportional to the rate of rotation of the substrate about a third axis; andat least one flexible coupling between the drive subsystem and the sense subsystem. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An angular rate sensor comprising
a substrate; -
a drive subsystem partially supported by the substrate with at least one spring, at least one anchor; and
at least one mass;a sense subsystem partially supported by the substrate with at least one spring, and at least one anchor; and
at least one mass; and
wherein the one motion of the sense subsystem can be sensed by a transducer and is proportional to the rate of rotation of the substrate; andat least one flexible coupling between the drive subsystem and the sense subsystem, wherein the drive subsystem, the sense subsystem and the flexible coupling form the mechanical system with at least two resonant modes, at least one drive subsystem anti-resonance and a least one sense subsystem anti-resonance. - View Dependent Claims (9, 10, 11, 12, 13)
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Specification