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METHODS FOR MEASUREMENT AND CHARACTERIZATION OF INTERFEROMETRIC MODULATORS

  • US 20090201034A1
  • Filed: 09/30/2008
  • Published: 08/13/2009
  • Est. Priority Date: 02/11/2008
  • Status: Abandoned Application
First Claim
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1. A method of measuring electrical characteristics of a microelectromechanical system (MEMS) device, the method comprising:

  • modulating an initial signal with an additional signal to generate an input signal, wherein the additional signal comprises a random or pseudo-random signal;

    applying the input signal to the MEMS device;

    measuring an output signal of the MEMS device;

    demodulating the output signal to obtain a resultant signal, wherein the resultant signal is indicative of a response of the MEMS device to the initial signal; and

    determining an electrical characteristic of the MEMS device based at least in part upon the resultant signal.

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