MULTILAYERED DEFORMABLE ELEMENT WITH REDUCED MEMORY PROPERTIES IN A MEMS DEVICE
First Claim
Patent Images
1. A microelectromechanical device, comprising:
- a substrate;
a deformable element held on the substrate; and
a protective layer for blocking a combination of an undesired chemical component with the deformable element, wherein said undesired chemical component is capable of changing a mechanical property of the deformable element if combined with the deformable element.
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Accused Products
Abstract
A deformable element for use in microelectromechanical systems comprises a core layer and a protective layer. The protective layer is capable of deterring combinations of undesired chemical components in operational environments with the core layer of the deformable element.
41 Citations
25 Claims
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1. A microelectromechanical device, comprising:
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a substrate; a deformable element held on the substrate; and a protective layer for blocking a combination of an undesired chemical component with the deformable element, wherein said undesired chemical component is capable of changing a mechanical property of the deformable element if combined with the deformable element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A microelectromechanical device, comprising:
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a substrate; a deformable element held above the substrate; and a thin film of getter material disposed on a major surface of the deformable hinge. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A microelectromechanical device, comprising:
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a substrate; and a deformable element held on the substrate, comprising; a core layer; and a protective layer disposed on a major surface of the core layer, wherein the protective layer has a first diffusion coefficient at a first temperature range and a second diffusion coefficient at a temperature range that different from the first temperature range. - View Dependent Claims (21, 22, 23, 24, 25)
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Specification