PHOTONIC MEMS AND STRUCTURES
First Claim
1. An optical device, comprising:
- a non-transparent substrate;
a first optical layer which is at least partially transmissive and at least partially reflective to incident light; and
a second optical layer, formed on the substrate, which is at least partially reflective to incident light, the second optical layer spaced from the first optical layer, wherein the second optical layer is movable between a first position at a first distance from the first optical layer and a second position at a second distance from the first optical layer, wherein movement of the second optical layer between the first and second positions modulates the reflectivity of the device.
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Accused Products
Abstract
An optical device includes a non-transparent substrate. The optical device further includes a first optical layer which is at least partially transmissive and at least partially reflective to incident light. The optical device further includes a second optical layer which is at least partially reflective to incident light. The second optical layer is spaced from the first optical layer. At least one of the first optical layer and the second optical layer is movable between a first position at a first distance from the first optical layer and a second position at a second distance from the first optical layer. Movement of the at least one of the first optical layer and the second optical layer between the first and second positions modulates the reflectivity of the device.
174 Citations
36 Claims
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1. An optical device, comprising:
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a non-transparent substrate; a first optical layer which is at least partially transmissive and at least partially reflective to incident light; and a second optical layer, formed on the substrate, which is at least partially reflective to incident light, the second optical layer spaced from the first optical layer, wherein the second optical layer is movable between a first position at a first distance from the first optical layer and a second position at a second distance from the first optical layer, wherein movement of the second optical layer between the first and second positions modulates the reflectivity of the device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. An optical device comprising:
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means for supporting an interferometric modulator, the supporting means being non-transparent; first means for reflecting light, the first reflecting means being at least partially transmissive and at least partially reflective to incident light; and second means for reflecting light formed on the means for supporting, the second reflecting means being at least partially reflective to incident light, the second reflecting means spaced from the first reflecting means, wherein the second reflecting means is movable between a first position at a first distance from the first reflecting means and a second position at a second distance from the first reflecting means, wherein movement of the second reflecting means between the first and second positions modulates the reflectivity of the device. - View Dependent Claims (27, 28, 29)
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30. A method of manufacturing an optical device comprising:
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providing a non-transparent substrate; and forming one or more layers on the non-transparent substrate, the one or more layers including; a first optical layer which is at least partially transmissive and at least partially reflective to incident light; and a second optical layer which is at least partially reflective to incident light, the second optical layer spaced from the first optical layer, wherein the second optical layer is movable between a first position at a first distance from the first optical layer and a second position at a second distance from the first optical layer, wherein movement of the second optical layer between the first and second positions modulates the reflectivity of the device. - View Dependent Claims (31, 32, 33, 34, 35)
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36. A method of modulating light, the method comprising:
providing an optical device comprising; a non-transparent substrate; a first optical layer which is at least partially transmissive and at least partially reflective to incident light; and a second optical layer, formed on the substrate, which is at least partially reflective to incident light, the second optical layer spaced from the first optical layer, wherein at the second optical layer is movable between a first position at a first distance from the first optical layer and a second position at a second distance from the first optical layer; and moving the second optical layer while irradiating the device with light.
Specification