METHOD AND SYSTEM FOR PRODUCING THIN FILM BIOSENSORS
First Claim
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1. A method of manufacturing an analyte sensor, comprising:
- providing a non-conductive substrate;
depositing a conductive material including a layer of thin gold film having a thickness not exceeding approximately 120 nm on the substrate;
defining electrodes from the deposited conductive material; and
depositing a coverlay material over the substrate such that the coverlay material is disposed over at least a portion of the defined electrodes.
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Abstract
Method and system for providing a substrate, forming a plurality of electrodes on the substrate, the electrodes including a thin gold layer on the substrate, the gold layer having a thickness of less than approximately 120 nm, and further, each of the formed plurality of electrodes are co-planar relative to each other, and providing a coverlay over at least a portion of the each of the plurality of electrodes are provided.
139 Citations
23 Claims
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1. A method of manufacturing an analyte sensor, comprising:
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providing a non-conductive substrate; depositing a conductive material including a layer of thin gold film having a thickness not exceeding approximately 120 nm on the substrate; defining electrodes from the deposited conductive material; and depositing a coverlay material over the substrate such that the coverlay material is disposed over at least a portion of the defined electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method, comprising:
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providing a substrate; forming a plurality of electrodes on the substrate, the electrodes including a thin gold layer on the substrate, the gold layer having a thickness of less than approximately 120 nm, and further, each of the formed plurality of electrodes are co-planar relative to each other; and providing a coverlay over at least a portion of the each of the plurality of electrodes. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23)
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Specification