GROOVE ON COVER PLATE OR SUBSTRATE

• US 20090323170A1
• Filed: 06/30/2008
• Published: 12/31/2009
• Est. Priority Date: 06/30/2008
• Status: Abandoned Application

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Lin, Peng Cheng
• Application Number:
  US12/165,429
• Publication Number:
  US 20090323170A1
• Time in Patent Office: Days
• US Class Current: 359/291
• CPC Class Codes: B81C 1/00333 Aspects relating to packaging of MEMS devices, not covered by groups B81C1/00269 - B81C1/00325
• CPC Class Codes: B81C 1/00873 characterised by special arrangements of the devices, allowing an easier separation
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

An improved substrate or cover plate design with a groove for effective singulation of individual display apparatus. In one embodiment, the display apparatus comprises a prefabricated groove on an inside face of a substrate or cover plate to facilitate separation of a MEMS device from a plurality of MEMS devices formed a substrate. In some embodiments, the prefabricated grooves make breaking at pseudo scribe lines simple by thinning and weakening the substrate or cover plate at a scribe zone and act as an improved guide for breaking. Scribe cut relief preserves components, structural integrity, and produces a clean break without inducing excessive or unwanted stresses into the MEMS core and ensures no damage at the panel ledge for subsequent interconnect assembly.

Claims

1. A method of manufacturing a microelectromechanical systems (MEMS) based display device, the method comprising:

providing a transparent substrate comprising a first MEMS device and a second MEMS device formed thereon;

providing a cover plate, wherein at least one of the cover plate or the substrate includes a groove on an inside face;

orienting the cover plate or substrate so that the groove is located in an area between the first and second MEMS devices;

joining the cover plate to the substrate to form a first package around the first MEMS device and a second package around the second MEMS device;

applying a force between the first and second packages, wherein the force propagates a crack along the groove; and

separating the first and second packages.

2. The method of claim 1, wherein the groove weakens the cover plate or substrate so that less force is required to separate the first and second packages.

3. The method of claim 1, wherein the groove acts as a guide for the crack.

4. The method of claim 1, wherein separating the first and second packages comprises scribing the substrate or the cover plate.

5. The method of claim 1, wherein a depth of the groove is between 100 to 300 microns.

6. The method of claim 5, wherein a width of the groove is between 100 to 300 microns.

7. The method of claim 1, wherein a depth of the groove is between ⅓

to ½

a thickness of the cover plate.

8. The method of claim 1, wherein a width of the groove is the same as a depth of the groove.

9. The method of claim 1, further comprising forming the groove by one or more of sandblasting, etching, waterjetting, sawing, laser scribing, or grinding.

10. The method of claim 1, wherein the cover plate comprises a recess on a surface facing the transparent substrate.

11. The method of claim 1, wherein the groove circumscribes the first or second MEMS device.

12. The method of claim 11, wherein the groove forms a circular or rectangular shape around the MEMS device.

13. The method of claim 1, wherein the groove surrounds less than an entire perimeter around the MEMS device.

14. The method of claim 1, wherein the substrate comprises glass or plastic.

15. The method of claim 1, wherein the cover plate comprises glass, plastic, or metal.

16. The method of claim 1, wherein the method takes place in ambient conditions.

17. A microelectromechanical systems (MEMS) based device, comprising:

a transparent substrate comprising a first MEMS device and a second MEMS device formed thereon;

a cover plate joined to the substrate to form a first package around the first MEMS device and a second package around the second MEMS device; and

a groove on an inside face of at least one of the cover plate or the substrate, wherein the groove is between the first and second MEMS devices, wherein an inside face of the cover plate faces an inside face of the substrate, wherein the groove on the inside face of at least one of the cover plate or the substrate reduces a strength of the cover plate or substrate.

18. The device of claim 17, wherein the groove weakens the cover plate or substrate so that less force is required to separate the first and second packages.

19. The device of claim 17, further comprising a crack propagated by applying force along the groove, wherein the groove acts as a guide for the crack.

20. The device of claim 17, wherein the substrate comprises a size of about 14″

×

16″

or greater.

21. The device of claim 17, wherein the cover plate is larger than about 14″

×

16″ and

includes multiple grooves oriented between adjacent MEMS devices.

22. The device of claim 17, wherein the separating the first and second MEMS devices comprises scribing and breaking the substrate and the cover plate, wherein the groove provides scribe cut relief.

23. The device of claim 17, further comprising:

a display;

a processor that is configured to communicate with the display, the processor being configured to process image data; and

a memory device that is configured to communicate with the processor.

24. The device of claim 23, further comprising a driver circuit configured to send at least one signal to the display.

25. The device of claim 24, further comprising a controller configured to send at least a portion of the image data to the driver circuit.

26. The device of claim 23, further comprising an image source module configured to send the image data to the processor.

27. The device of claim 26, wherein the image source module comprises at least one of a receiver, transceiver, and transmitter.

28. The device of claim 23, further comprising an input device configured to receive input data and to communicate the input data to the processor.

29. A microelectromechanical systems (MEMS) based device, comprising:

a transparent substrate supporting a first MEMS device and a second MEMS device formed thereon;

a cover plate for covering the first and second MEMS devices; and

means for weakening the substrate or the cover plate, wherein the weakening means is located in an area between the first and second MEMS devices, wherein the cover plate is coupled to the substrate to form a first package around the first MEMS device and a second package around the second MEMS device.

30. The device of claim 29, wherein the weakening reduces the force required to separate the first and second packages.

31. The device of claim 29, wherein the weakening means acts as a guide for a crack propagated along the weakening means.

32. The device of claim 29, wherein the first and second MEMS devices comprise interferometric modulator arrays.