Semiconductor device and method of manufacturing the same
First Claim
Patent Images
1. A semiconductor device, comprising:
- a substrate;
an alignment mark formed on said substrate and composed of a metal film;
a cover insulating film formed on said alignment mark and covering an entire surface of said alignment mark; and
a polyimide film formed on said cover insulating film, and having an opening, which is opened on said alignment mark and has an end face aligning with an end face of said alignment mark, in plan view.
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Accused Products
Abstract
A semiconductor device includes a substrate; an alignment mark formed on the substrate and composed of a metal film; a cover insulating film formed on the alignment mark and covering an entire surface of the alignment mark; and a polyimide film formed on the cover insulating film, and having an opening, which is opened on the alignment mark and has an end face aligning with an end face of the alignment mark, in plan view.
21 Citations
8 Claims
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1. A semiconductor device, comprising:
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a substrate; an alignment mark formed on said substrate and composed of a metal film; a cover insulating film formed on said alignment mark and covering an entire surface of said alignment mark; and a polyimide film formed on said cover insulating film, and having an opening, which is opened on said alignment mark and has an end face aligning with an end face of said alignment mark, in plan view. - View Dependent Claims (2, 3, 4, 5)
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6. A method of manufacturing a semiconductor device, comprising:
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forming an alignment mark which is composed of a metal film on a substrate; forming a cover insulating film on an entire surface of said alignment mark; and forming a polyimide film on an entire surface of said cover insulating film and patterning said polyimide film in a state where said cover insulating film remains on the entire surface of said alignment mark to form an opening opened on said alignment mark and has an end face aligning with an end face of said alignment mark, in plan view, in said polyimide film. - View Dependent Claims (7, 8)
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Specification