INSPECTION SYSTEM AND METHOD
First Claim
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1. A manufacturing method including illuminating a target, comprising:
- providing a light controller having a plurality of pixels;
projecting light from a first light source to the light controller, wherein the light from the first light source is incident on the light controller at a first angle;
providing first and second optical paths between the light controller and the target;
controlling the pixels to establish illumination characteristics for the first optical path and the second optical path.
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Abstract
A manufacturing method and system are disclosed for illuminating a target. A light controller has a plurality of pixels, and light is projected from at least a first light source to the light controller, wherein the light from the first light source is incident on the light controller at a first angle. The pixels are controlled to establish illumination characteristics for first and second optical paths between the light controller and the target.
87 Citations
19 Claims
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1. A manufacturing method including illuminating a target, comprising:
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providing a light controller having a plurality of pixels; projecting light from a first light source to the light controller, wherein the light from the first light source is incident on the light controller at a first angle; providing first and second optical paths between the light controller and the target; controlling the pixels to establish illumination characteristics for the first optical path and the second optical path. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An inspection system, comprising:
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a light controller having a plurality of pixels; a first light source arranged to project light incident on the light controller at a first angle; wherein the light controller is operable to control the pixels to establish illumination characteristics for first and second optical paths between the light controller and a target. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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Specification