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INSPECTION SYSTEM AND METHOD

  • US 20100007896A1
  • Filed: 09/25/2009
  • Published: 01/14/2010
  • Est. Priority Date: 04/03/2007
  • Status: Active Grant
First Claim
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1. A manufacturing method including illuminating a target, comprising:

  • providing a light controller having a plurality of pixels;

    projecting light from a first light source to the light controller, wherein the light from the first light source is incident on the light controller at a first angle;

    providing first and second optical paths between the light controller and the target;

    controlling the pixels to establish illumination characteristics for the first optical path and the second optical path.

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