METHOD FOR MANUFACTURING MICRO MOVABLE ELEMENT

• US 20100018635A1
• Filed: 07/27/2009
• Published: 01/28/2010
• Est. Priority Date: 07/28/2008
• Status: Active Grant

• Current Assignee: DRNC Holdings, Inc. (InterDigital, Inc.)
• Original Assignee: Fujitsu Limited
• Inventors: SAWAKI, Ippei, OKUDA, Hisao, MIZUNO, Yoshihiro, MATSUMOTO, Tsuyoshi, TSUBOI, Osamu, SONEDA, Hiromitsu, KOUMA, Norinao
• Granted Patent: US 8,202,382 B2
• Time in Patent Office: Days
• US Class Current: 156/155
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 2203/0154 Torsion bars
• CPC Class Codes: B81C 1/00825 Protect against mechanical threats, e.g. against shocks, or residues B81C1/00261 take precedence
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: H04Q 2213/13003 Constructional details of switching devices

Abstract

A method for manufacturing a micro movable element includes: forming a movable section, a frame, and a connecting section connecting the movable section with the frame on a substrate; bonding a film to a surface of the substrate in forming the movable section, the frame, and the connecting section; and patterning the film to form a support structure being bridged between the movable section and the frame.

Claims

1. A method for manufacturing a micro movable element, comprising:

forming a movable section, a frame, and a connecting section connecting the movable section with the frame on a substrate;

bonding a film to a surface of the substrate in forming the movable section, the frame, and the connecting section; and

patterning the film to form a support structure being bridged between the movable section and the frame.

2. The method for manufacturing the micro movable element according to claim 1, further comprising:

removing at least a part of the support structure.

3. The method for manufacturing the micro movable element according to claim 2, further comprising:

attaching the substrate to a base before removing at least a part of the support structure.

4. The method for manufacturing the micro movable element according to claim 1, wherein

the support structure is made of an insulating material.