HYDROSTATIC LIQUID-METAL DEFORMABLE OPTICAL ELEMENTS

• US 20100020423A1
• Filed: 09/11/2008
• Published: 01/28/2010
• Est. Priority Date: 07/23/2008
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Phillips, Alton H.
• Granted Patent: US 8,002,420 B2
• Time in Patent Office: Days
• US Class Current: 359/846
• CPC Class Codes: G02B 26/06 for controlling the phase of light G02B26/08 takes precedence , measuring optical phase difference G01J9/00
• CPC Class Codes: G02B 26/0825 the reflecting element being a flexible sheet or membrane, e.g. for varying the focus flexible mirrors for cosmetic use A45D42/24
• CPC Class Codes: G03F 7/70266 Adaptive optics, e.g. deformable optical elements for wavefront control, e.g. for aberration adjustment or correction

Abstract

Optical components and systems are disclosed that include an optical element and a base member. Multiple wells correspond to respective locations on a surface of the optical element. Liquid metal in the wells is coupled to the respective locations to apply respective hydrostatic pressures to the locations. At least one displacement device is coupled to at least one well to selectively change the respective hydrostatic pressure applied, relative to the base member, by the liquid metal in the well to the respective location. The “liquid metal” is any of several formulations of metal that are liquid under actual-use conditions (e.g., a liquid alloy of gallium). The liquid metal can be displaced through conduits to change the hydrostatic pressure being applied to the respective locations. The displacement, and hence the hydrostatic pressure, can be feedback controlled.

Claims

1. An optical component, comprising:

an optical element having a surface;

a base member;

multiple wells corresponding to respective locations on the surface;

liquid metal contained in the wells and coupled to the respective locations to apply respective hydrostatic pressures to the respective locations; and

at least one displacement device coupled to at least one well, the displacement device being configured to selectively change the respective hydrostatic pressure applied, relative to the base member, by the liquid metal in the well to the respective location.

2. The optical component of claim 1, wherein:

the optical element has an optical surface and a reverse surface; and

the wells correspond to respective locations on the reverse surface.

3. The optical component of claim 2, wherein the liquid metal in the wells is coupled to the respective locations by contact of the liquid metal in the wells to the respective locations.

4. The optical component of claim 3, wherein:

the base member has a surface facing the reverse surface of the optical element; and

the wells are situated on the surface of the base member.

5. The optical component of claim 4, wherein:

the wells are hydraulically coupled to respective access wells primed with liquid metal; and

respective heights of liquid metal in the access wells produce respective hydrostatic pressures of liquid metal in the wells at the respective locations on the reverse surface.

6. The optical component of claim 5, wherein each well is hydraulically coupled to its respective access well by a respective liquid-metal conduit.

7. The optical component of claim 6, further comprising vibration-reduction devices associated with the conduits.

8. The optical component of claim 7, wherein:

the vibration-reduction devices comprise restrictor conduits interposed in the liquid-metal conduits between the wells and access wells; and

the restrictor conduits have a reduced transverse dimension relative to at least one of the well and access well, to reduce flow velocity of liquid metal in the restrictor conduit relative to in the well or in the access well.

9. The optical component of claim 8, wherein the vibration-reduction devices comprise a magnetic-field source situated relative to the liquid-metal conduits to apply a magnetic field across the liquid metal as the liquid metal flows in the conduits, the magnetic field generating heat-producing eddy currents in the liquid metal that damp vibrations by removing energy from corresponding movement of the liquid metal through the conduit.

10. The optical component of claim 9, wherein the vibration-reduction devices comprise an electrohydrodynamic (EHD) device coupled to the liquid metal in the conduit, to impart motion of the liquid metal in the conduit.

11. The optical system of claim 10, wherein the EHD device is feedback controlled to provide at least vibration damping of the optical element relative to the base member in substantially real time.

12. The optical component of claim 5, further comprising means for adding or removing liquid metal from the access wells.

13. The optical component of claim 2, wherein:

each well includes a respective volume of liquid metal and a respective movable post extending into the respective volume;

the displacement device comprises at least one movable-post actuator; and

a movable post moved by the actuator changes the respective hydrostatic pressure applied by the liquid metal in the respective well to the respective location.

14. The optical component of claim 13, wherein the displacement device comprises a respective actuator coupled to each movable post.

15. The optical component of claim 14, wherein the actuators are linear actuators.

16. The optical component of claim 13, wherein:

the respective hydrostatic pressures in the wells are applied to respective fixed posts mounted to the respective locations on the reverse surface of the optical element and extending into the liquid metal in the respective wells; and

the change in hydrostatic pressure in a well changes a buoyant force applied by the liquid metal in the well to the respective fixed post.

17. The optical component of claim 16, wherein:

the base member has a first surface facing the reverse surface of the optical element and a second surface opposite the first surface;

the actuators are situated on the second surface; and

the movable posts extend from the actuators through the base member to the wells.

18. The optical component of claim 17, wherein the wells are situated on the first surface of the base member.

19. The optical component of claim 17, wherein the wells are situated on the reverse surface of the optical element.

20. The optical component of claim 2, wherein:

the base member has a first surface facing the reverse surface of the optical element; and

the wells are defined in the first surface.

21. The optical component of claim 2, wherein the wells are defined in the reverse surface of the optical element.

22. The optical component of claim 21, further comprising movable posts extending into the liquid metal in the respective wells.

23. The optical component of claim 22, wherein;

the displacement device comprises respective actuators coupled to the movable posts; and

the actuators are selectively actuatable to move the respective movable posts in the respective wells to produce respective hydrostatic pressures applied by the liquid metal to the respective locations.

24. The optical component of claim 23, wherein:

the base member has a first surface facing the reverse surface of the optical element and a second surface opposite the first surface;

the actuators are situated on the second surface; and

the movable posts extend from the respective actuators through the base member to the respective wells.

25. The optical component of claim 2, wherein the wells are located on a first surface of the base member facing the reverse surface of the optical element.

26. The optical component of claim 25, further comprising respective fixed posts coupled to the reverse surface of the optical element and extending into the liquid metal in the respective wells.

27. The optical component of claim 26, further comprising respective movable posts extending into the liquid metal in the respective wells.

28. The optical component of claim 27, wherein:

the displacement device comprises respective actuators coupled to the movable posts; and

the actuators are selectively actuatable to move the respective movable posts in the respective wells to produce respective hydrostatic pressures applied by the liquid metal to the fixed posts.

29. The optical component of claim 28, wherein the actuators are situated on a second surface, opposite the first surface, of the base member.

30. The optical component of claim 1, wherein the optical element is a mirror.

31. The optical component of claim 1, further comprising a frame to which the base member and optical element are coupled.

32. The optical component of claim 31, further comprising kinematic connectors mounting at least the optical element to the frame.

33. The optical component of claim 1, wherein the base member defines a coolant conduit that conducts a temperature-controlled coolant fluid.

34. The optical component of claim 1, wherein:

the displacement device comprises respective linear actuators coupled to respective movable posts; and

the linear actuators are selectively actuatable to move the respective movable posts in the respective wells to produce respective hydrostatic pressures applied by the liquid metal to the posts.

35. The optical component of claim 34, wherein the linear actuators are mounted to a second surface, opposite the first surface, of the base member.

36. The optical component of claim 1, wherein:

the optical element has an optical surface and a reverse surface;

the base member has a first surface and an opposing second surface, the first surface facing the reverse surface of the optical element; and

the wells are situated on the second surface.

37. The optical component of claim 36, wherein:

the displacement device comprises respective actuators coupled to respective movable posts extending into the liquid metal in respective wells; and

the actuators are selectively actuatable to move the respective movable posts in the respective wells to produce respective hydrostatic pressures applied by the liquid metal to the fixed posts.

38. The optical component of claim 1, wherein:

the displacement device comprises a movable transfer stylus configured selectively to hold and to release liquid metal for transport and release, respectively; and

liquid metal added or removed from a well changes the hydrostatic pressure applied by the liquid metal to the respective location.

39. The optical component of claim 38, wherein the transfer stylus is operable selectively:

to have a temperature below a freezing temperature of the liquid metal sufficiently to hold frozen liquid metal to the stylus; and

to have a temperature above a melting temperature of the liquid metal sufficiently to inhibit holding of liquid metal to the stylus.

40. The optical component of claim 1, further comprising:

a sensor-light source situated relative to the surface of the optical element;

a sensor situated relative to the source and to the surface of the optical element to receive sensor light, from that source, reflected from the surface; and

a controller connected to the sensor and to the displacement device, the controller being configured to actuate the at least one actuator, based on data from the sensor, to change hydrostatic pressure at at least one location.

41. An optical system, comprising:

a frame;

a base member mounted to the frame;

an optical element mounted to the frame and situated relative to the base member, the optical element having an optical surface and a reverse surface;

multiple wells corresponding to respective locations on the reverse surface;

liquid metal contained in the wells and coupled to the respective locations to apply respective hydrostatic pressures to the respective locations; and

at least one displacement device coupled to at least one well, the displacement device being configured to selectively change the respective hydrostatic pressure applied, relative to the base member, by the liquid metal in the well to the respective location.

42. The optical system of claim 41, wherein the base member and the optical element are mounted to the frame kinematically.

43. The optical system of claim 41, wherein the liquid metal in the wells is coupled to the respective locations by respective posts extending into respective wells.

44. The optical system of claim 43, wherein the posts are fixed posts mounted to the respective locations.

45. The optical system of claim 41, wherein:

the optical element includes a reverse surface; and

the wells are on the reverse surface.

46. The optical system of claim 41, wherein:

the base member has a first surface facing the reverse surface of the optical element; and

the wells are on the first surface.

47. The optical system of claim 46, further comprising respective fixed posts mounted to the respective locations and extending to liquid metal in respective wells on the first surface.

48. The optical system of claim 41, wherein each well comprises a respective displacement device.

49. The optical system of claim 48, wherein each displacement device comprises:

a movable post extending into the well; and

an actuator coupled to the movable post to move the post relative to liquid metal in the respective well to change hydrostatic pressure being applied to the respective location by the liquid metal in the respective well.

50. The optical system of claim 49, wherein:

the wells are located on the reverse surface of the optical element;

the actuators are mounted on the base member; and

the movable posts extend from the respective actuators on the base member to respective wells on the reverse surface.

51. The optical system of claim 49, wherein:

the wells are located on the base member;

the actuators are mounted on the base member; and

the movable posts extend from the respective actuators on the base member to respective wells on the base member.

52. The optical system of claim 51, further comprising respective fixed posts extending from the respective wells on the base member to the respective locations on the reverse surface of the optical element.

53. The optical system of claim 41, wherein the base member is actively cooled.

54. An optical system, comprising:

frame means for supporting at least one optical element of the system;

a base member mounted to the frame means;

an optical element mounted to the frame means relative to the base member and having an optical surface and a reverse surface;

multiple containment means for holding respective amounts of liquid metal, the containment means being situated on the base member or optical element and corresponding to respective locations on the surface;

coupling means for coupling the containment means to respective locations on the reverse surface such that a change in hydrostatic pressure in a particular containment means translates into a corresponding change in force applied to the respective location; and

actuation means for selectively changing hydrostatic pressure in the respective containment means to produce the corresponding change in force at a respective location on the reverse surface.

55. The optical system of claim 54, wherein the coupling means comprises fixed posts attached to the respective locations on the reverse surface and contacting the liquid metal in the respective containment means.

56. The optical system of claim 54, wherein the coupling means comprises respective movable posts at least contacting the liquid metal in the respective containment means.

57. The optical system of claim 56, wherein the movable posts are coupled to respective actuation means.

58. The optical system of claim 54, further comprising sensing means for sensing an optical parameter of the optical surface.

59. The optical system of claim 58, further comprising feedback-control means connecting the sensing means to the actuation means so as to selectively change hydrostatic pressure in the respective containment means to produce the corresponding change in force at the respective location on the reverse surface to produce a corresponding change in a respective location on the optical surface according to the feedback.

60. A method for providing an active-optics change of an optical surface of an optical element, comprising:

providing multiple discrete contained volumes of liquid metal;

coupling the contained volumes to respective locations on a reverse surface of the optical element to apply respective hydrostatic forces to the respective locations; and

changing the respective hydrostatic force applied by at least one of the contained volumes to the respective location to produce a corresponding change in a region of the optical surface.

61. The method of claim 60, further comprising:

monitoring performance of the optical surface; and

changing the respective hydrostatic force applied by at least one of the contained volumes in response to the monitored performance to achieve a desired performance.

62. The method of claim 60, wherein coupling is achieved using fixed posts connecting the respective contained volumes to the respective locations.

63. The method of claim 60, wherein changing the respective hydrostatic forces comprises:

providing each of the contained volumes with a movable post partially immersed in the liquid metal in the contained volume; and

displacing one or movable posts as required to change the respective hydrostatic pressure.

64. The method of claim 63, wherein displacing comprises:

connecting the movable post to a linear actuator; and

energizing the linear actuator as required to move the movable post relative to the contained volume.

65. The method of claim 64, wherein the contained volumes are in the reverse surface of the optical element.

66. The method of claim 65, wherein the contained volumes are in a surface of a base member relative to which the hydrostatic pressures are applied.

67. The method of claim 60, further comprising controlling flow velocity of the liquid metal to attenuate a vibration in the optical element.