In-Plane Sensor, Out-of-Plane Sensor, and Method for Making Same

• US 20100024549A1
• Filed: 08/04/2009
• Published: 02/04/2010
• Est. Priority Date: 07/29/2008
• Status: Active Grant

• Current Assignee: PixArt Imaging Incorporated
• Original Assignee: Pixart Imaging Incorporation ROC
• Inventors: Lee, Sheng Ta, Wang, Chuan Wei
• Granted Patent: US 8,371,167 B2
• Time in Patent Office: Days
• US Class Current: 73/504.140
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type

Abstract

According to the present invention, an in-plane sensor comprises a structure unit which includes: a fixed structure including a fixed finger and a fixed column connected to each other, the fixed finger having a supported end supported by the fixed column and a suspended end; and a movable structure including at least one proof mass which surrounds the fixed finger in a horizontal plane.

Claims

1. An in-plane sensor, comprising a structure unit which includes:

a fixed structure including a fixed finger and a fixed column connected to each other, the fixed finger having a supported end supported by the fixed column and a suspended end; and

a movable structure including at least one proof mass which surrounds the fixed finger in a horizontal plane.

2. The in-plane sensor of claim 1, wherein the proof mass has an opening.

3. The in-plane sensor of claim 2, comprising two or more structure units connected together.

4. The in-plane sensor of claim 2, further comprising a spring and an anchor, and wherein the proof mass is connected to the anchor by the spring.

5. The in-plane sensor of claim 2, wherein the continuous length of the proof mass is limited within a predetermined length in at least x or y direction.

6. An out-of-plane sensor, comprising a structure unit which includes:

a fixed structure including at least one fixed part; and

a movable structure including a movable part above or below the fixed part,

wherein at least one of the fixed part and the movable part includes an opening.

7. The out-of-plane sensor of claim 6, wherein the fixed structure includes an upper fixed part and a lower fixed part, and wherein the movable part is located between the upper and lower fixed parts.

8. The out-of-plane sensor of claim 6, comprising two or more structure units connected together.

9. The out-of-plane sensor of claim 6, further comprising a spring and an anchor, and wherein the movable part is connected to the anchor by the spring.

10. The out-of-plane sensor of claim 9, comprising four springs and four anchors located at four sides of the structure unit.

11. The out-of-plane sensor of claim 6, wherein the continuous length of the proof mass is limited within a predetermined length in at least x or y direction.