METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF
First Claim
1. A method of manufacturing a display device, comprising:
- forming at least one interferometric modulator over a substrate, each interferometric modulator comprising a first mirror formed over the substrate and a second mirror separated by a spacing from the first mirror; and
forming at least one transistor circuit on the substrate.
4 Assignments
0 Petitions
Accused Products
Abstract
An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.
176 Citations
33 Claims
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1. A method of manufacturing a display device, comprising:
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forming at least one interferometric modulator over a substrate, each interferometric modulator comprising a first mirror formed over the substrate and a second mirror separated by a spacing from the first mirror; and forming at least one transistor circuit on the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A display device comprising:
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means for modulating light formed over a substrate, the light modulating means comprising a first mirror formed over the substrate and a second mirror separated by a spacing from the first mirror; and means for driving formed on the substrate. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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Specification