Mirror device comprising layered electrode

• US 20100067094A1
• Filed: 11/16/2009
• Published: 03/18/2010
• Est. Priority Date: 11/01/2003
• Status: Active Grant

• Current Assignee: Olympus Corporation, Silicon Quest Kabushiki-Kaisha
• Original Assignee: Olympus Corporation, Silicon Quest Kabushiki-Kaisha
• Inventors: Maeda, Yoshihiro, Sugimoto, Naoya, Ishii, Fusao
• Granted Patent: US 7,957,050 B2
• Time in Patent Office: Days
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: H04N 5/7458 the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
• CPC Class Codes: H04N 9/315 Modulator illumination systems general applications of lighting devices F21V; general optical systems G02B; lamp houses for projectors not peculiar to the presence of an electronic spatial light modulator G03B21/20

Abstract

The present invention provides an image display system implemented with a mirror device comprises a plurality of pixel elements formed on a substrate: wherein: each of said pixel elements comprises a micromirror disposed above and supported on a hinge extended from said substrate; and; a drive electrode disposed on the substrate for receiving signals to control and drive the mirror, wherein the drive electrode comprises an insulation layer, and a first electrode connected to a memory and a second electrode connected to a plate line with the insulation layer disposed between and insulating the first and the second electrode.

Claims

1. An image display system implemented with a mirror device comprises a plurality of pixel elements formed on a substrate wherein:

each of said pixel elements comprises a micromirror disposed above and supported on a hinge extended from said substrate; and

a drive electrode disposed on the substrate for receiving signals to control and drive the mirror, wherein the drive electrode comprises an insulation layer, and a first electrode connected to a memory and a second electrode connected to a plate line with the insulation layer disposed between and insulating the first and the second electrode.

2. The mirror device according to claim 1, wherein:

the second electrodes of a plurality of the pixel elements are commonly connected to one of said plate lines.

3. The mirror device according to claim 1, wherein:

the first electrode and second electrode are disposed adjacent to each other to constitute and function as a capacitor.

4. The mirror device according to claim 3, wherein:

the capacitor having a capacitance smaller than a capacitance of another capacitor as a part of the memory.

5. An image display system implemented with a mirror device comprising a plurality of pixel elements formed on a substrate wherein:

each of said pixel elements comprises a micromirror disposed above said substrate supported on a deflectable hinge extended from the substrate;

a first drive circuit and a second drive circuit disposed on the substrate;

a drive electrode disposed on the substrate for receiving signals to control and drive the mirror, wherein the drive electrode comprises an insulation layer, and a first electrode connected to the first drive circuit and a second electrode connected to the second drive circuit with the insulation layer disposed between and insulating the first and the second electrode.

6. The mirror device according to claim 5, wherein:

the second drive circuit applies a voltage to the second electrode having a same voltage on the micromirror.

7. The mirror device according to claim 5, wherein:

the second electrode applies a voltage to the second drive circuit in a period shorter than a minimum period the first electrode is controlled to change an electrode voltage applied thereon.

8. The mirror device according to claim 5, wherein:

the second drive circuit changes the voltage and applies a high (H) voltage to the second electrode at or after elapse of a predefined period of time after the voltage of the first electrode is changed from the H level to a low (L) level.

9. The mirror device according to claim 5, wherein:

the second drive circuit changes the voltage and applies a high (H) voltage to the second electrode synchronously with a timing the first electrode changes the voltage from the L level to H level.

10. The mirror device according to claim 5, wherein:

the second drive circuit changes the voltage and applies a high (H) voltage to the second electrode for a certain period of time after the first electrode change the voltage from the H level to the L level.

11. An image display system implemented with a mirror device comprising a plurality of pixel elements formed on a substrate wherein:

each of said pixel elements comprises a micromirror disposed above said substrate supported on a deflectable hinge extended from the substrate;

a first drive circuit and a second drive circuit disposed on the substrate;

a drive electrode disposed on the substrate for receiving signals to control and drive the mirror, wherein the drive electrode comprises an insulation layer, and a first electrode and a second electrode with the insulation layer disposed between and insulating the first and the second electrode, wherein the first drive circuit changes a voltage applied to the first electrode when the second drive circuit changes a voltage applied to the second electrode.

12. The mirror device according to claim 11, wherein:

the second drive circuit changes the voltage applied to the second electrode between a high impedance and a predetermined voltage for changing electric fields of the electrodes.

13. The mirror device according to claim 11, wherein:

the first and second drive circuits control voltages applied to the first and second drive electrode by shutting-off of electric fields or turning on electric fields in each of the pixel elements.

14. The mirror device according to claim 11, wherein:

the first and second drive circuits control voltages applied to the first and second drive electrode by changing a region of generating electric fields in each of the pixel elements.

15. The mirror device according to claim 11, wherein:

the first and second drive circuits control voltages applied to the first and second drive electrode for generating electric fields in each of said pixel elements in accordance with a deflection state of the micromirror.

16. The mirror device according to claim 13, wherein:

the first and second drive circuits control voltages applied to the first and second drive electrode for shutting off electric fields in each of the pixel elements to control the micromirror to start an oscillate from a stationary operation state.

17. The mirror device according to claim 13, wherein:

the first and second drive circuits control voltages applied to the first and second drive electrode for generating an electric field to reduce an oscillation amplitude of the micromirror.

18. The mirror device according to claim 14 wherein:

the first and second drive circuits control voltages applied to the first and second drive electrode for changing a region of an electric field and maintaining a stationary deflection state of the micromirror.