Capacitative Pressure Sensor
First Claim
1. A capacitative pressure sensor comprising:
- a silicon substrate;
CMOS layers deposited on the silicon substrate;
a conductive layer deposited on the CMOS layer; and
,a passivation layer on the conductive layer;
a conductive membrane extending from the substrate assembly and spaced from the conductive layer;
wherein,the conductive layer has a plurality of apertures and the silicon substrate defines a passage for fluid communication with fluid pressure exterior to the pressure sensor; and
a cap extending from the substrate assembly to cover the membrane and form a chamber on one side of the conductive membrane that is sealed from the fluid pressure exterior to the pressure sensor.
2 Assignments
0 Petitions
Accused Products
Abstract
A capacitative pressure sensor that has a silicon substrate, CMOS layers deposited on the silicon substrate, a conductive layer deposited on the CMOS layer and, a passivation layer on the conductive layer. A conductive membrane extends from the substrate assembly such that it is spaced from the conductive layer. The conductive layer has a plurality of apertures and the silicon substrate to define a passage for fluid communication with fluid pressure exterior to the pressure sensor and a cap extending from the substrate assembly to cover the membrane and form a chamber on one side of the conductive membrane that is sealed from the fluid pressure exterior to the pressure sensor.
27 Citations
6 Claims
-
1. A capacitative pressure sensor comprising:
-
a silicon substrate; CMOS layers deposited on the silicon substrate; a conductive layer deposited on the CMOS layer; and
,a passivation layer on the conductive layer; a conductive membrane extending from the substrate assembly and spaced from the conductive layer;
wherein,the conductive layer has a plurality of apertures and the silicon substrate defines a passage for fluid communication with fluid pressure exterior to the pressure sensor; and a cap extending from the substrate assembly to cover the membrane and form a chamber on one side of the conductive membrane that is sealed from the fluid pressure exterior to the pressure sensor. - View Dependent Claims (2, 3, 4, 5, 6)
-
Specification