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METHOD OF FABRICATING AN ELECTRODE FOR A BULK ACOUSTIC RESONATOR

  • US 20100107389A1
  • Filed: 12/23/2009
  • Published: 05/06/2010
  • Est. Priority Date: 01/11/2002
  • Status: Abandoned Application
First Claim
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1. A method of producing a resonator in thin-film technology, the resonator comprising a piezoelectric layer arranged at least partially between a lower electrode and an upper electrode, the resonator being formed over a substrate, the method comprising:

  • forming the lower electrode of the resonator over the substrate;

    depositing and patterning an insulating layer over the substrate, the insulating layer comprising a thickness substantially equal to a thickness of the lower electrode;

    removing a portion of the insulating layer to partially expose a surface of the lower electrode;

    removing a portion of the insulating layer over the surface of the lower electrode by chemical mechanical polishing;

    forming the piezoelectric layer over the lower electrode; and

    producing the upper electrode on the piezoelectric layer.

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