METHOD AND DEVICE FOR MULTISTATE INTERFEROMETRIC LIGHT MODULATION
First Claim
1. A light modulator, comprising:
- a movable reflector comprising an electrically conductive material, the movable reflector positioned between a first set and a second set of electrodes, the movable reflector being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first set of electrodes than is the undriven position and wherein the second driven position is farther from the first set of electrodes than is the undriven position;
wherein the first set of electrodes drives the movable reflector to the first driven position;
wherein the second set of electrodes drives the movable reflector to the second driven position; and
further comprisinga third set of electrodes configured to repel the movable reflector towards the first driven position; and
a fourth set of electrodes configured to repel the movable reflector towards the second driven position.
3 Assignments
0 Petitions
Accused Products
Abstract
A multi-state light modulator comprises a first reflector 104. A first electrode 142 is positioned at a distance from the first reflector 104. A second reflector 14 is positioned between the first reflector 104 and the first electrode 142. The second reflector 14 is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector 104. In one embodiment, the light modulator has latch electrodes 17 and 143, which hold the light modulator in a driven state. In another embodiment the latch electrodes 17 and 143 are used to alter the actuation and release thresholds of the light modulator.
80 Citations
25 Claims
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1. A light modulator, comprising:
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a movable reflector comprising an electrically conductive material, the movable reflector positioned between a first set and a second set of electrodes, the movable reflector being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first set of electrodes than is the undriven position and wherein the second driven position is farther from the first set of electrodes than is the undriven position; wherein the first set of electrodes drives the movable reflector to the first driven position; wherein the second set of electrodes drives the movable reflector to the second driven position; and
further comprisinga third set of electrodes configured to repel the movable reflector towards the first driven position; and a fourth set of electrodes configured to repel the movable reflector towards the second driven position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A light modulator, comprising:
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means for reflecting light positioned between first and second means for positioning the reflecting means, the reflecting means being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first positioning means than is the undriven position and wherein the second driven position is farther from the first positioning means than is the undriven position; third means for repelling the movable reflector towards the first driven position; and fourth means for repelling the movable reflector towards the second driven position. - View Dependent Claims (17, 18, 19, 20)
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21. A method of driving a MEMS device comprising a first set, a second set, a third set, and a fourth set of electrodes, and a movable electrode positioned between the first set of electrodes and the second set of electrodes and configured to move to at least two positions therebetween, the method comprising:
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applying a first voltage potential difference between the first set of electrodes and the movable electrode so as to drive the movable electrode to a first position; applying a second voltage potential difference between the third set of electrodes and the movable electrode so as to repel the movable electrode to the first position; applying a third voltage potential difference between the second set of electrodes and the movable electrode so as to drive the movable electrode to a second position; and applying a fourth voltage potential difference between the fourth set of electrodes and the movable electrode so as to repel the movable electrode to the second position. - View Dependent Claims (22)
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23. A method of fabricating a multistate light modulator, the method comprising:
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forming first and second electrodes; forming a movable reflector comprising an electrically conductive material, the movable reflector positioned between the first and second electrodes, the movable reflector being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first electrode than is the undriven position and wherein the second driven position is farther from the first electrode than is the undriven position; forming at least one third electrode adjacent to the first electrode, wherein at least one of the first electrode and the at least one third electrode is configured to repel the movable reflector away from the at least one third electrode; and forming at least one fourth electrode adjacent to the second electrode, wherein at least one of the second electrode and the at least one fourth electrode is configured to repel the movable reflector away from the at least one fourth electrode. - View Dependent Claims (24, 25)
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Specification