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METHOD AND DEVICE FOR MULTISTATE INTERFEROMETRIC LIGHT MODULATION

  • US 20100110526A1
  • Filed: 01/11/2010
  • Published: 05/06/2010
  • Est. Priority Date: 09/27/2004
  • Status: Active Grant
First Claim
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1. A light modulator, comprising:

  • a movable reflector comprising an electrically conductive material, the movable reflector positioned between a first set and a second set of electrodes, the movable reflector being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first set of electrodes than is the undriven position and wherein the second driven position is farther from the first set of electrodes than is the undriven position;

    wherein the first set of electrodes drives the movable reflector to the first driven position;

    wherein the second set of electrodes drives the movable reflector to the second driven position; and

    further comprisinga third set of electrodes configured to repel the movable reflector towards the first driven position; and

    a fourth set of electrodes configured to repel the movable reflector towards the second driven position.

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