OPTICAL DEVICE AND METHOD FOR FABRICATING THE SAME
First Claim
1. An optical device comprising:
- a semiconductor substrate layer including a plurality of elements;
at least one optical component formed at a first principal surface side of said semiconductor substrate layer; and
an interconnect layer formed on a second principal surface of said semiconductor substrate layer and including a conductive material, the second principal surface being an opposite side of the first principal surface side;
wherein, in said semiconductor substrate layer, (i) a photoelectric conversion element region is formed at a position corresponding to said at least one optical component such that said photoelectric conversion element region extends from a second principal surface side toward a first principal surface of said semiconductor substrate layer, and (ii) at least one element among said plurality of elements is formed near the second principal surface,at least a part of said at least one optical component is formed as a part of said semiconductor substrate layer, andsaid interconnect layer includes said conductive material electrically connected to said photoelectric conversion element region and said at least one element.
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Accused Products
Abstract
An optical device according to an aspect of the present invention includes: a semiconductor substrate layer including a plurality of elements; at least one optical component which is formed at the first principal surface side of the semiconductor substrate layer and transmits incident light of desired wavelength; and an interconnect layer formed on second principal surface of the semiconductor substrate layer. In the semiconductor substrate layer, (i) a photoelectric conversion element region is formed at a position corresponding to the at least one optical component, and (ii) at least one element among the plurality of elements is formed near the second principal surface. At least a part of the at least one optical component is formed as a part of the semiconductor substrate layer, and the interconnect layer includes the conductive material electrically connected to the photoelectric conversion element region and the at least one element.
41 Citations
20 Claims
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1. An optical device comprising:
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a semiconductor substrate layer including a plurality of elements; at least one optical component formed at a first principal surface side of said semiconductor substrate layer; and an interconnect layer formed on a second principal surface of said semiconductor substrate layer and including a conductive material, the second principal surface being an opposite side of the first principal surface side; wherein, in said semiconductor substrate layer, (i) a photoelectric conversion element region is formed at a position corresponding to said at least one optical component such that said photoelectric conversion element region extends from a second principal surface side toward a first principal surface of said semiconductor substrate layer, and (ii) at least one element among said plurality of elements is formed near the second principal surface, at least a part of said at least one optical component is formed as a part of said semiconductor substrate layer, and said interconnect layer includes said conductive material electrically connected to said photoelectric conversion element region and said at least one element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method for fabricating an optical device, the optical device including:
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a semiconductor substrate layer including a plurality of elements; and an interconnect layer formed on a second principal surface of the semiconductor substrate layer and including a conductive material, the second principal surface being an opposite side to a first principal surface side; wherein, in the semiconductor substrate layer, (i) a photoelectric conversion element region is formed such that the photoelectric conversion element region extends from a second principal surface side toward a first principal surface of the semiconductor substrate layer, and (ii) at least one element among the plurality of elements is formed near the second principal surface, and the interconnect layer includes the conductive material electrically connected to the photoelectric conversion element region and the at least one element, said method comprising; forming an adhesive layer on a first principal surface of a substrate, and forming a support substrate which supports the substrate via the adhesive layer, the substrate being made of a semiconductor and serving as a base material for the semiconductor substrate layer; forming the semiconductor substrate layer; and forming the interconnect layer including the conductive material on the second principal surface of the semiconductor substrate layer. - View Dependent Claims (18, 19, 20)
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Specification