Microelectromechanical sensor and operating method for a microelectromechanical sensor
First Claim
1. A microelectromechanical sensor, comprising:
- at least one movable electrode,an electrode arrangement spaced apart from the movable electrode and having a plurality of electrodes which can be driven separately and to which corresponding electrode signals can be applied, wherein the electrode signals can be used to electrostatically set/change the application of force, the spring constant and the read-out factor of the resonator,an electrode signal generation unit, which is connected to the electrode arrangement and can be supplied with a force application signal, a spring constant signal and a read-out factor signal, which define the settings/changes to be brought about with regard to the application of force, spring constant and read-out factor of the movable electrode,wherein the electrode signal generation unit generates each electrode signal in a manner dependent on the force application signal, the spring constant signal and the read-out factor signal and matches the electrode signals to one another in such a way that the application of force, the spring constant and the read-out factor of the resonator can be set/changed to specific desired values independently of one another.
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Accused Products
Abstract
A microelectromechanical sensor and operating method therefor. The sensor has at least one movable electrode. An electrode arrangement is spaced apart from the movable electrode with a plurality of electrodes that can be driven separately and to which corresponding electrode signals can be applied that can be used to electrostatically set/change the application of force, the spring constant and the read-out factor of the movable electrode. An electrode signal generation unit is connected to the electrode arrangement and can be supplied with a force application signal, a spring constant signal and a read-out factor signal, which define the settings/changes to be brought about with regard to the application of force, spring constant and read-out factor of the movable electrode. The electrode signal generation unit generates each electrode signal in a manner dependent on the force application signal, the spring constant signal and the read-out factor signal and matches the electrode signals to one another so that the application of force, the spring constant and the read-out factor of the movable electrode can be set/changed to specific desired values independently of one another.
11 Citations
11 Claims
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1. A microelectromechanical sensor, comprising:
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at least one movable electrode, an electrode arrangement spaced apart from the movable electrode and having a plurality of electrodes which can be driven separately and to which corresponding electrode signals can be applied, wherein the electrode signals can be used to electrostatically set/change the application of force, the spring constant and the read-out factor of the resonator, an electrode signal generation unit, which is connected to the electrode arrangement and can be supplied with a force application signal, a spring constant signal and a read-out factor signal, which define the settings/changes to be brought about with regard to the application of force, spring constant and read-out factor of the movable electrode, wherein the electrode signal generation unit generates each electrode signal in a manner dependent on the force application signal, the spring constant signal and the read-out factor signal and matches the electrode signals to one another in such a way that the application of force, the spring constant and the read-out factor of the resonator can be set/changed to specific desired values independently of one another. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An operating method for a microelectromechanical sensor having at least one movable electrode and an electrode arrangement spaced apart from the movable electrode and having a plurality of electrodes which can be driven separately and to which corresponding electrode signals can be applied, comprising the following steps:
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generation of the electrode signals in a manner dependent on a force application signal, a spring constant signal and a read-out factor signal, which define the settings/changes to be effected with regard to the application of force, spring constant and read-out factor of the movable electrode, application of the electrode signals to the corresponding electrodes in order to electrostatically set/change the application of force, the spring constant and the read-out factor of the movable electrode, wherein each electrode signal is generated in a manner dependent on the force application signal, the spring constant signal and the read-out factor signal and the electrode signals are matched to one another in such a way that the application of force, the spring constant and the read-out factor of the movable electrode are set/changed to specific desired values independently of one another.
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Specification