PIEZOELECTRIC DEVICES AND METHODS FOR MANUFACTURING SAME

  • US 20100201221A1
  • Filed: 02/10/2010
  • Published: 08/12/2010
  • Est. Priority Date: 02/10/2009
  • Status: Active Grant
First Claim
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1. A piezoelectric device, comprising:

  • a piezoelectric frame comprising a frame portion and a tuning-fork type piezoelectric vibrating piece, including multiple vibrating arms and at least one electrode, surrounded by and attached to the frame portion, the piezoelectric frame including a first major surface and an opposing second major surface;

    a lid having a thickness, an outer major surface, and an opposing inner major surface, the inner major surface being bonded to the first major surface of the piezoelectric frame, the lid defining at least one frequency-adjustment hole passing through the thickness of the lid from the inner major surface to the outer major surface thereof;

    a package base having a thickness, an outer major surface, and an opposing inner major surface, the inner major surface being bonded to the second major surface of the piezoelectric frame, the package base defining at least one through-hole electrode passing via an electrode through-hole through the thickness of the package base from the inner major surface to the outer major surface thereof, the at least one through-hole electrode providing a respective electrical connection of the electrode on the tuning-fork type piezoelectric vibrating piece to outside the package base; and

    at least one external electrode made of an electrically conductive material, the external electrode being connected to a respective electrode in a respective electrode through-hole extending on both the lid and package base so as to cover the at least one electrode through-hole and the at least one frequency-adjustment hole.

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