INTEGRATED BIO-CHIP AND METHOD OF FABRICATING THE INTEGRATED BIO-CHIP

• US 20100204064A1
• Filed: 02/11/2010
• Published: 08/12/2010
• Est. Priority Date: 02/11/2009
• Status: Active Grant

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: CHO, Seong-ho
• Granted Patent: US 8,921,280 B2
• Time in Patent Office: Days
• US Class Current: 506/17
• CPC Class Codes: G01N 21/6454 using an integrated detector array

Abstract

An integrated bio-chip includes; a sample detection portion including at least one light receiving device which detects fluorescent light emitted from at least one sample, a light transfer portion disposed on a light incident surface of the sample detection portion, and which includes at least one excitation light absorbing waveguide which absorbs an excitation light and transmits the fluorescent light emitted from the at least one sample, and a sample reaction portion disposed adjacent to an incident end of the at least one excitation light absorbing waveguide, and including at least one reaction region on which the at least one sample is attached, wherein the sample detection portion, the light transfer portion, and the sample reaction portion are integrally coupled to each other as a single component.

Claims

1. An integrated bio-chip comprising:

a sample detection portion including at least one light receiving device which detects fluorescent light emitted from at least one sample;

a light transfer portion disposed on a light incident surface of the sample detection portion, and which includes at least one excitation light absorbing waveguide which absorbs an excitation light and transmits the fluorescent light emitted from the at least one sample; and

a sample reaction portion disposed adjacent to an incident end of the at least one excitation light absorbing waveguide, and including at least one reaction region on which the at least one sample is attached,

wherein the sample detection portion, the light transfer portion, and the sample reaction portion are integrally coupled to each other as a single component.

2. The integrated bio-chip of claim 1, wherein the light transfer portion includes a light blocking portion which surrounds each of the at least one excitation light absorbing waveguide and which blocks the excitation light and the fluorescent light from traveling therethrough.

3. The integrated bio-chip of claim 2, wherein the light blocking portion includes a black material which absorbs the excitation light and the fluorescent light.

4. The integrated bio-chip of claim 2, wherein the at least one excitation light absorbing waveguide has a refractive index which is greater than a refractive index of the light blocking portion.

5. The integrated bio-chip of claim 1, wherein the excitation light absorbing waveguide includes a color filter core which transmits the fluorescent light emitted from the samples and absorbs the excitation light which excites the samples.

6. The integrated bio-chip of claim 5, wherein the color filter core has a refractive index which is greater than a refractive index of a substrate surrounding the color filter core.

7. The integrated bio-chip of claim 5, wherein the excitation light absorbing waveguide further comprises a clad layer disposed on a circumference of the color filter core and wherein the clad layer has a refractive index that is less than a refractive index of the color filter core.

8. The integrated bio-chip of claim 1, further comprising a micro lens disposed on an optical path between the at least one reaction region and the light receiving device, wherein the micro lens condenses the fluorescent light onto the light receiving device.

9. The integrated bio-chip of claim 1, further comprising a fluorescence anti-reflection layer disposed on the at least one reaction region, wherein the fluorescence anti-reflection layer transmits the fluorescent light emitted from the at least one sample.

10. The integrated bio-chip of claim 1, wherein the sample detection portion is selected from the group consisting of a photo multiplier tube, a charge coupled device and a complementary metal oxide semiconductor image sensor.

11. The integrated bio-chip of claim 1, wherein the sample detection portion includes a front illumination type image sensor.

12. The integrated bio-chip of claim 1, wherein the sample detection portion includes a back illumination type image sensor.

13. The integrated bio-chip of claim 1, wherein the light receiving device of the sample detection portion corresponds to the at least one reaction region in one of a one-to-one correspondence and a one-to-many correspondence.

14. The integrated bio-chip of claim 1, further comprising a frame on which the sample reaction portion, the light transfer portion and the sample detection portion are disposed.

15. The integrated bio-chip of claim 1, further comprising a cover glass disposed spaced apart from the sample reaction portion, wherein the cover glass protects the sample reaction portion.

16. The integrated bio-chip of claim 15, wherein the cover glass includes a fluorescence reflection layer on an inner surface of the cover glass, wherein the fluorescence reflection layer reflects the fluorescent light emitted from the at least one sample.

17. The integrated bio-chip of claim 16, wherein the fluorescence reflection layer is one of a dichroic mirror which reflects a wavelength band corresponding to the fluorescent light and a band reject filter which shields a wavelength band corresponding to the fluorescent light.

18. The integrated bio-chip of claim 16, wherein the fluorescence reflection layer passes a wavelength band of the excitation light therethrough.

19. The integrated bio-chip of claim 15, wherein at least one micro mirror which condenses and reflects the fluorescent light emitted from the at least one sample is disposed on an inner surface of the cover glass.

20. The integrated bio-chip of claim 19, wherein the micro mirror is concave and reflects incident fluorescent light while condensing the fluorescent light emitted from the at least one sample.

21. The integrated bio-chip of claim 19, wherein the at least one micro mirror corresponds to the reaction region of the sample reaction portion in one of a one-to-one correspondence and a one-to-many correspondence.

22. The integrated bio-chip of claim 15, wherein an anti-excitation light reflection layer prevents the excitation light from being reflected on an outer surface of the cover glass.

23. A method of fabricating an integrated bio-chip, the method comprising:

preparing a sample detection portion including at least one light receiving device;

providing a light transfer portion having at least one excitation light absorbing waveguide on a light incident surface of the sample detection portion; and

providing a sample reaction portion including at least one reaction region on which at least one sample is attached on an upper surface of the light transfer portion.

24. The method of claim 23, wherein the providing of the light transfer portion comprises:

applying an excitation light absorbing material on an upper surface of the sample detection portion, wherein the excitation light absorbing material absorbs an excitation light and transmits a fluorescent light;

forming the excitation light absorbing waveguide by forming at least one trench in the applied excitation light absorbing material to expose the light incident surface of the sample detection portion except for the portion thereof where the light receiving device is located; and

filling a black material which absorbs the excitation light and the fluorescent light in the at least one trench to form a light blocking portion.

25. The method of claim 23, wherein the providing of the light transfer portion comprises:

applying a black material which absorbs the excitation light and the fluorescent light on an upper surface of the sample detection portion;

forming at least one trench in the applied black material to expose the light incident surface of the sample detection portion where the light receiving device is located, to form a light blocking portion; and

filling an excitation light absorbing material that absorbs the excitation light and transmits the fluorescent light in the at least one trench to form the excitation light absorbing waveguide.

26. The method of claim 23, wherein the providing of the light transfer portion comprises:

forming at least one penetration hole in a substrate;

filling a color filter material in the at least one penetration hole to from a color filter core; and

bonding the substrate and the color filter core to the light incident surface of the sample detection portion.

27. The method of claim 26, wherein the providing of the light transfer portion comprises disposing a clad layer on an inner wall of the at least one penetration hole before forming the color filter core.

28. The method of claim 23, wherein the providing of the light transfer portion further comprises disposing at least one micro lens on the at least one excitation light absorbing waveguide.

29. The method of claim 23, wherein the sample detection portion comprises at least one selected from the group consisting of a photo multiplier tube, a charge coupled device and a complementary metal oxide semiconductor image sensor.

30. The method of claim 29, wherein the preparing of the sample detection portion comprises:

preparing a pre-polished sample detection portion including a photodiode portion including photodiodes and a distribution line portion disposed on a surface of the photodiode portion;

bonding a dummy substrate on a surface of the pre-polished sample detection portion where the distribution line portion is disposed; and

polishing the opposite surface of the pre-polished sample detection portion to a predetermined depth;

wherein the light transfer portion is disposed on the surface of the sample detection portion where the photodiode portion is disposed.

31. The method of claim 23, wherein the at least one light receiving device of the sample detection portion corresponds to the at least one excitation light absorbing waveguide in one of a one-to-one correspondence and a one-to-many correspondence.

32. The method of claim 23, wherein the bonding of the light transfer portion to the sample detection portion is performed in one of a wafer unit and a single chip unit.

33. The method of claim 23, further comprising disposing a cover glass at a predetermined distance from the sample reaction portion.

34. The method of claim 33, wherein the disposing of the cover glass comprises:

forming a fluorescence reflection layer that reflects a fluorescent light emitted from the at least one sample on an inner surface of the cover glass.

35. The method of claim 33, wherein the disposing of the cover glass comprises providing at least one micro mirror that condenses and reflects a fluorescent light emitted from the at least one sample on the inner surface of the cover glass.

36. The method of claim 35, wherein the disposing of the at least one micro mirror comprises forming the micro mirror to be concave to reflect the fluorescent light from the at least one sample while condensing the fluorescent light incident thereto.

37. The method of claim 35, wherein the disposing of the at least one micro mirror comprises forming the micro mirror to correspond to the reaction region of the sample reaction portion in one of a one-to-one correspondence and a one-to-many correspondence.

38. The method of claim 33, wherein the disposing of the cover glass further comprises an anti-excitation light reflection layer which prevents an excitation light from being reflected on an outer surface of the cover glass.

39. A bio-material detecting apparatus using an integrated bio-chip, which includes:

a sample detection portion including at least one light receiving device which detects fluorescent light;

a light transfer portion disposed on a light incident surface of the sample detection portion, and which includes at least one excitation light absorbing waveguide which absorbs an excitation light for exciting samples and which transmits a fluorescent light emitted from the at least one sample; and

a sample reaction portion disposed on a portion corresponding to an incident end of the at least one excitation light absorbing waveguide in the light transfer portion, and including at least one reaction region on which the at least one sample is attached, wherein the sample detection portion, the light transfer portion, and the sample reaction portion are integrally coupled to each other, the bio-material detecting apparatus comprising;

an illumination optics which illuminates excitation light to the integrated bio-chip; and

a stage on which the integrated bio-chip is detachably installed.