SENSOR ELEMENT
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Abstract
A sensor element is provided for sensing accelerations in three spatial directions, which furnishes reliable measurement results and moreover can be implemented economically and with a small configuration. The sensor element encompasses at least one seismic mass deflectable in three spatial directions, a diaphragm structure that functions as a suspension mount for the seismic mass, and at least one stationary counterelectrode for capacitive sensing of the deflections of the diaphragm structure. According to the exemplary embodiments and/or exemplary methods of the present invention, the diaphragm structure encompasses at least four electrode regions, electrically separated from one another, that are mechanically coupled via the seismic mass.
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Citations
14 Claims
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1-7. -7. (canceled)
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8. A sensor element for sensing accelerations in three spatial directions, comprising:
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at least one seismic mass deflectable in three spatial directions; a diaphragm structure that functions as a suspension mount for the seismic mass and encompasses at least one electrode; and at least one stationary counterelectrode for capacitive sensing of the deflections of the diaphragm structure; wherein the diaphragm structure encompasses at least four electrode regions, electrically separated from one another, that are mechanically coupled via the seismic mass. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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Specification