PLASMA PROCESSING APPARATUS

  • US 20100216313A1
  • Filed: 10/09/2008
  • Published: 08/26/2010
  • Est. Priority Date: 10/12/2007
  • Status: Active Grant
First Claim
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1. A plasma processing device for providing plasma treatment where an object to be treated, which is attached on an upper surface of an adhesive sheet held by a holder frame, is mounted on a stage, and plasma is generated in a vacuum chamber that covers the stage therein, by which the object on the stage undergoes the plasma treatment, the device comprising:

  • a dielectric cover member located at a predetermined position above the stage so that the holder frame is covered with the cover member and the object to be treated is exposed from an opening formed in the center of the cover member, while the object to be treated is undergoing the plasma treatment.

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