Optical Measurement Apparatus and Method Therefor
First Claim
1. An optical measurement apparatus comprising:
- an optical system comprising;
a source arranged to generate, when in use, a probe beam, the optical system being arranged to direct, when in use, the probe beam to a location to be measured;
a detector arranged to receive, when in use, a reflected beam from the location to be measured; and
a receiving axis;
wherein the apparatus further comprises;
a processing resource operably coupled to the detector and capable of assessing when in use, a characteristic of an output generated by the detector, assessment of the characteristic of the output corresponding to an assessment of degree of alignment of the location to be measured with the receiving axis of the optical system.
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Accused Products
Abstract
An optical measurement apparatus comprises an optical system (100) having a receiving axis (115). The optical system (100) comprises a source (102) that generates a probe beam that is directed to a location to be measured (114). A detector (112) of the optical system receives a reflected beam from the location to be measured (114). The apparatus also comprises a processing resource that receives an output signal from the detector (112) and makes an assessment of a characteristic of the output signal in order to determine a degree of alignment of the location to be measured (114) with the receiving axis (115) of the optical system (100).
14 Citations
25 Claims
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1. An optical measurement apparatus comprising:
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an optical system comprising; a source arranged to generate, when in use, a probe beam, the optical system being arranged to direct, when in use, the probe beam to a location to be measured; a detector arranged to receive, when in use, a reflected beam from the location to be measured; and a receiving axis;
wherein the apparatus further comprises;a processing resource operably coupled to the detector and capable of assessing when in use, a characteristic of an output generated by the detector, assessment of the characteristic of the output corresponding to an assessment of degree of alignment of the location to be measured with the receiving axis of the optical system. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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2. (canceled)
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3. (canceled)
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4. (canceled)
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23. (canceled)
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24. (canceled)
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25. A method of optical measurement, comprising:
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generating a probe beam; directing the probe beam to a location to be measured; receiving via an optical system having a receiving axis a reflected beam from the location to be measured; and assessing a characteristic of an output signal corresponding to the reflected beam in order to determine degree of alignment of the location to be measured with the receiving axis of the optical system.
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Specification