PACKAGE OF ENVIRONMENTALLY SENSITIVE ELECTRONIC DEVICE AND FABRICATING METHOD THEREOF
First Claim
1. A package of an environmentally sensitive electronic device, the package comprising:
- a first substrate;
a second substrate disposed over the first substrate;
an environmentally sensitive electronic device disposed on the first substrate and sandwiched between the first substrate and the second substrate;
a plurality of side wall barrier structures disposed between the first substrate and the second substrate, wherein the barrier structures surround the environmentally sensitive electronic device, and a water vapor transmission rate of the barrier structures is less than 10−
1 g/m2/day; and
a fill disposed between the first substrate and the second substrate, wherein the filler covers the environmentally sensitive electronic device and the side wall barrier structures.
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Accused Products
Abstract
A package of an environmentally sensitive electronic device including a first substrate, a second substrate, an environmentally sensitive electronic device, a plurality of barrier structures, and a fill is provided. The second substrate is disposed above the first substrate. The environmentally sensitive electronic device is disposed on the first substrate and located between the first substrate and the second substrate. The barrier structures are disposed between the first substrate and the second substrate, wherein the barrier structures surround the environmental sensitive electronic device, and the water vapor transmission rate of the barrier structures is less than 10−1 g/m2/day. The fill is disposed between the first substrate and the second substrate and covers the environmentally sensitive electronic device and the barrier structures.
89 Citations
25 Claims
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1. A package of an environmentally sensitive electronic device, the package comprising:
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a first substrate; a second substrate disposed over the first substrate; an environmentally sensitive electronic device disposed on the first substrate and sandwiched between the first substrate and the second substrate; a plurality of side wall barrier structures disposed between the first substrate and the second substrate, wherein the barrier structures surround the environmentally sensitive electronic device, and a water vapor transmission rate of the barrier structures is less than 10−
1 g/m2/day; anda fill disposed between the first substrate and the second substrate, wherein the filler covers the environmentally sensitive electronic device and the side wall barrier structures. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of packaging an environmentally sensitive electronic device, comprising:
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forming an environmentally sensitive electronic device on a first substrate; forming a plurality of barrier structures on the first substrate or on the second substrate, wherein the side wall barrier structures surround the environmentally sensitive electronic device, and the water vapor transmission rate of the side wall barrier structures is less than 10−
1 g/m2/day.forming a fill on the first substrate to cover the environmentally sensitive electronic device and the side wall barrier structures; and pressing the second substrate on the fill. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25)
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Specification