AUTOMATED SUBSTRATE HANDLING AND FILM QUALITY INSPECTION IN SOLAR CELL PROCESSING
First Claim
1. A solar cell formation process, comprising:
- positioning a substrate carrier having an array of substrate receiving positions on a carrier receiving surface;
positioning a substrate on a substrate receiving surface of an end effector of a robot;
determining an actual position of the substrate on the substrate receiving surface of the end effector, wherein determining the actual position comprises;
emitting electromagnetic radiation towards a surface of the substrate and the substrate receiving surface of the end effector; and
receiving a portion of the emitted electromagnetic radiation at a defined wavelength reflected from the surface of the substrate and the substrate receiving surface of the end effector by a detector, wherein the detector uses the received portion of the emitted electromagnetic radiation to form a first image; and
positioning the substrate in one of the array of substrate receiving positions, wherein positioning the substrate comprises adjusting the placement of the substrate using the information received from the first image.
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Accused Products
Abstract
The present invention generally provides an apparatus and a method for automatically calibrating the placement of fragile substrates into a substrate carrier. Embodiments of the present invention also provide an apparatus and a method for inspecting the fragile substrates prior to processing to prevent damaged substrates from being further processed or broken in subsequent transferring steps. Embodiments of the invention also generally provide an apparatus and a method for determining the alignment and orientation substrates that are to be delivered into or removed from a substrate carrier. Embodiments of the invention further provide an apparatus and method for accurately positioning the substrate carrier for substrate loading. The substrate carriers are generally used to support a batch of substrates that are to be processed in a batch processing chamber.
98 Citations
20 Claims
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1. A solar cell formation process, comprising:
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positioning a substrate carrier having an array of substrate receiving positions on a carrier receiving surface; positioning a substrate on a substrate receiving surface of an end effector of a robot; determining an actual position of the substrate on the substrate receiving surface of the end effector, wherein determining the actual position comprises; emitting electromagnetic radiation towards a surface of the substrate and the substrate receiving surface of the end effector; and receiving a portion of the emitted electromagnetic radiation at a defined wavelength reflected from the surface of the substrate and the substrate receiving surface of the end effector by a detector, wherein the detector uses the received portion of the emitted electromagnetic radiation to form a first image; and positioning the substrate in one of the array of substrate receiving positions, wherein positioning the substrate comprises adjusting the placement of the substrate using the information received from the first image. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A solar cell formation process, comprising:
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positioning an end effector of a robot in a nominal position over a first substrate disposed in one of an array of substrate receiving positions on a substrate carrier; receiving the first substrate on the end effector while the end effector is in the nominal position; determining an actual position of the first substrate positioned on the end effector using a detection system; calculating an offset of the actual position from an expected position of the first substrate on the end effector; calculating a new nominal position using the offset and storing the new nominal position in memory of a system controller; receiving a second substrate on the end effector; positioning the end effector in the new nominal position; and depositing the second substrate in the one of the array of substrate receiving positions. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16)
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17. A solar cell processing system, comprising:
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a robot having an end effector configured to receive a substrate; a detection system comprising; an electromagnetic radiation source configured to emit electromagnetic radiation at one or more desired wavelengths; a detection assembly that is positioned to receive at least a portion of the emitted electromagnetic radiation reflected from a surface of a substrate disposed on the end effector of the robot; and one or more walls that are adapted to at least partially enclose the electromagnetic radiation source and the detection assembly; and a system controller configured to receive a signal from the detection assembly regarding the position of the substrate that is disposed on the end effector of the robot and determine an actual position of the substrate with respect to the end effector. - View Dependent Claims (18, 19, 20)
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Specification