SILICON MICROPHONE PACKAGE
First Claim
Patent Images
1. A silicon microphone package, comprising:
- an integrated microphone die having opposing first and second surfaces;
a first cover member formed over the first surface of the integrated microphone die, forming a first chamber therebetween; and
a second cover member formed over the second surface of the integrated microphone die, forming a second chamber therebetween.
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Accused Products
Abstract
A silicon microphone package is provided, including an integrated microphone die having opposing first and second surfaces, a first cover member formed over the first surface of the integrated microphone die to form a first chamber therebetween, and a second cover member formed over the second surface of the integrated microphone die to form a second chamber therebetween.
39 Citations
28 Claims
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1. A silicon microphone package, comprising:
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an integrated microphone die having opposing first and second surfaces; a first cover member formed over the first surface of the integrated microphone die, forming a first chamber therebetween; and a second cover member formed over the second surface of the integrated microphone die, forming a second chamber therebetween. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A silicon microphone package, comprising:
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an integrated microphone die having opposing first and second surfaces, wherein the integrated microphone die comprises an acoustic sensing element and a cavity; a first cover member formed over the first surface of the integrated microphone die, forming a first chamber therebetween; an acoustic opening formed in a portion of the first cover member, partially exposing the integrated microphone die; and a second cover member formed over the second surface of the integrated microphone die, forming a second chamber therebetween, wherein the second chamber contacts the cavity of the integrated microphone die. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A silicon microphone package, comprising:
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an integrated microphone die having opposing first and second surfaces, wherein the integrated microphone die comprises an acoustic sensing element and a cavity; a first cover member formed over the first surface of the integrated microphone die, forming a first chamber therebetween; a second cover member formed over the second surface of the integrated microphone die, forming a second chamber therebetween, wherein the second chamber contacts the cavity of the integrated microphone die; and an acoustic opening formed in a portion of the second cover member, partially exposing the integrated microphone die. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification