Cantilevers with Integrated Actuators for Probe Microscopy

• US 20100306885A1
• Filed: 08/09/2010
• Published: 12/02/2010
• Est. Priority Date: 08/15/2006
• Status: Active Grant

• Current Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Original Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Inventors: Degertekin, Fahrettin L.
• Granted Patent: US 8,321,959 B2
• Time in Patent Office: Days
• US Class Current: 850/7
• CPC Class Codes: G01Q 10/045 Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
• CPC Class Codes: G01Q 20/04 Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
• CPC Class Codes: G01Q 60/38 Probes, their manufacture, or their related instrumentation, e.g. holders

Abstract

An atomic force microscopy sensor includes a substrate, a cantilever beam and an electrostatic actuator. The cantilever beam has a proximal end and an opposite distal end. The proximal end is in a fixed relationship with the substrate and the cantilever beam is configured so that the distal end is in a moveable relationship with respect to the substrate. The electrostatic actuator includes a first electrode that is coupled to the cantilever beam adjacent to the proximal end and a spaced apart second electrode that is in a fixed relationship with the substrate. When an electrical potential is applied between the first electrode and the second electrode, the first electrode is drawn to the second electrode, thereby causing the distal end of the cantilever beam to move.

Claims

1. An atomic force microscopy sensor, comprising:

a. a substrate;

b. a cantilever beam having a proximal end and an opposite distal end, the proximal end in a fixed relationship with the substrate and the cantilever beam is configured so that the distal end is in a moveable relationship with respect to the substrate; and

c. a piezoelectric actuator that includes a piezoelectric member affixed to the cantilever beam adjacent to the proximal end so that when an electrical potential is applied to the piezoelectric member, the piezoelectric member will deform along a predetermined dimension, thereby causing the cantilever beam to bend.

2. The atomic force microscopy sensor of claim 1, wherein a probe extends from the distal end of the cantilever beam.

3. The atomic force microscopy sensor of claim 1, wherein a portion of the substrate is transparent and further comprising:

a. a diffraction grating disposed on the substrate; and

b. a reflective surface disposed on the cantilever beam in a location so that when a beam of electromagnetic radiation is directed to the reflective surface, a reflected beam interacts with the diffraction grating so as to form a diffraction pattern that is indicative of a displacement between the cantilever beam and the substrate.

4. The atomic force microscopy sensor of claim 3, wherein the diffraction grating is formed by the first electrode and the reflective surface is formed by the second electrode.

5. The atomic force microscopy sensor of claim 3, further comprising:

a. a third electrode that is coupled to the cantilever beam and spaced apart from the first electrode; and

b. a fourth electrode that is in a fixed relationship to the substrate and spaced apart from the third electrode,

the third electrode and the fourth electrode disposed so as to form a capacitor so that a displacement between the third electrode and the fourth electrode results in a corresponding capacitance that is indicative of a displacement of the distal end of the cantilever beam.