MICROELECTROMECHANICAL DEVICE WITH RESTORING ELECTRODE

• US 20100315695A1
• Filed: 10/13/2006
• Published: 12/16/2010
• Est. Priority Date: 05/01/1995
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Miles, Mark W.
• Granted Patent: US 7,898,722 B2
• Time in Patent Office: Days
• US Class Current: 359/290
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: G02B 6/29358 Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator G02B6/29347, G02B6/29349, G02B6/2935, G02B6/29361 take precedence; resonator evanescently coupled to light guide G02B6/29335
• CPC Class Codes: Y10T 29/4913 Assembling to base an electrical component, e.g., capacitor, etc.

Abstract

Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using chemical (e.g., water) or a plasma based etch process to remove the sacrificial layer.

Claims

1. A micro-electromechanical (MEMS) device, comprising:

an optically transmissive substrate;

an electrode located on the substrate;

a deflectable member spaced from the substrate by a first gap and positioned so that the electrode is between the deflectable member and the substrate, the deflectable member configured to deflect from a rest position to an actuated position when electrostatically attracted to the electrode; and

an encapsulation membrane comprising electrically conductive material, the encapsulation membrane spaced from the deflectable member by a second gap, the deflectable member being positioned between the optically transmissive substrate and the encapsulation membrane, the encapsulation membrane configured to electrostatically attract the deflectable member when a reset voltage is applied across the encapsulation membrane and the deflectable member, aiding the deflectable member in releasing from the actuated position.

2. The micro-electromechanical (MEMS) device of claim 1, wherein the encapsulation membrane comprises a substrate.

4. The micro-electromechanical (MEMS) device of claim 1, wherein the electrode comprises optically transparent conductive material.

5. The micro-electromechanical (MEMS) device of claim 4, wherein the optically transparent conductive material comprises an oxide.

6. The micro-electromechanical (MEMS) device of claim 4, wherein the transparent conductive material is disposed on the substrate between the substrate and the deflectable member.

7. The micro-electromechanical (MEMS) device of claim 1, wherein the substrate is substantially parallel to the encapsulation membrane.

8. The micro-electromechanical (MEMS) device of claim 1, further comprising a voltage controller electrically connected to the electrode and the deflectable member, the voltage controller configured to apply an actuation voltage across at least the electrode and the deflectable member to actuate the deflectable member, the voltage controller also electrically connected to the encapsulation membrane and further configured to apply a reset voltage across at least the encapsulation membrane and the deflectable member to move the deflectable member toward the rest position.

9. The micro-electromechanical (MEMS) device of claim 1, wherein the deflectable member is reflective.

28. The micro-electromechanical (MEMS) device of claim 1, wherein the encapsulation membrane includes drive circuitry mounted thereon.

30. The micro-electromechanical (MEMS) device of claim 1, wherein the electrode comprises a metallic mirror.

31. The micro-electromechanical (MEMS) device of claim 30, wherein the deflectable member and the metallic mirror define an interferometric optical cavity.

3. (canceled)

10. A device comprising:

an optically transmissive substrate;

at least one deflectable mirror spaced from the substrate, the at least one mirror configured to move between a rest position and an actuated position, the actuated position located closer to the substrate than the rest position;

at least one electrode located on the substrate, the at least one electrode configured to generate an electrostatic force to move the at least one mirror toward the actuated position when an actuation voltage is applied across the at least one electrode and the at least one mirror; and

an encapsulation membrane spaced from the at least one mirror such that the at least one mirror is positioned between the substrate and the encapsulation membrane, the encapsulation membrane comprising electrically conductive material and configured to generate an electrostatic force that attracts the at least one mirror toward the rest position when a reset voltage is applied across the encapsulation membrane and the at least one mirror,

wherein the reset voltage comprises a voltage sufficient to so that the electrostatic force generated overcomes the attraction force between the at least one mirror and the at least one electrode.

11. The device of claim 10, wherein the at least one electrode comprises optically transparent conductive material.

12. The device of claim 10, wherein the at least one electrode is positioned on the same side of the at least one deflectable mirror member as the optically transmissive substrate and spaced from the at least one mirror member.

13. The device of claim 10, wherein the optically transmissive substrate and the encapsulation membrane define a sealed chamber.

14. The device of claim 10, further comprising a voltage controller electrically connected to the at least one electrode and the at least one deflectable mirror, the voltage controller configured to apply a voltage across the at least one electrode and the at least one deflectable mirror to actuate the at least one deflectable mirror, the voltage controller also connected to the encapsulation membrane and further configured to apply a reset voltage across at least the encapsulation membrane and the at least one deflectable mirror to move the at least one mirror toward the rest position.

15. A micro-electromechanical device comprising:

an encapsulation membrane comprising an electrode;

an optically transmissive substrate spaced from the encapsulation membrane, wherein the encapsulation membrane and the substrate define at least one cavity;

a transparent conductive material positioned on the substrate; and

a movable reflective element located between the substrate and the encapsulation membrane and configured to move between a rest position and an actuated position in the at least one cavity, the device configured so as to receive driving voltages, and configured such that the driving voltages create an electrostatic attraction force between the reflective element and the transparent conductive material that moves the reflective element to an actuated position, and the driving voltages create an electrostatic attraction force between the reflective element and the electrode of the encapsulation membrane that moves the reflective element to a rest position.

16. The micro-electromechanical device of claim 15, wherein the reflective element comprises a reflective plate.

17. (canceled)

18. A method for resetting at least one mirror comprising:

applying a bias voltage to a reset electrode associated with a deflectable mirror assembly, and

discontinuing application of the bias voltage after deflection of a mirror within the assembly from an actuated position.

19. The method of claim 18, wherein the mirror assembly includes:

an optically transmissive substrate;

a membrane disposed spaced from the substrate;

at least one deflectable mirror member supported by at least one of the substrate and the at least one mirror member;

at least one address electrode configured to electrostatically attract the at least one deflectable mirror member to move the at least one mirror member into at least one actuated position; and

at least one reset electrode configured to electrostatically attract the at least one deflectable mirror member to move the at least one mirror member into a rest position, wherein electrostatic attraction between the at least one mirror member and the at least one reset electrode is sufficient to overcome electrostatic attraction between the at least one mirror member and the at least one address electrode.

20. The method of claim 19, wherein the at least one reset electrode is positioned on the same side of the at least one deflectable mirror member as the membrane and spaced from the at least one deflectable mirror member.

21. The method of claim 19, wherein the at least one address electrode is positioned on the same side of the at least one deflectable mirror member as the optically transmissive substrate and spaced from the at least one mirror member, the address electrode comprising optically transparent conductive material.

22. The method of claim 18, wherein the mirror assembly is present in an array and the bias voltage is applied to a plurality of mirror assemblies in the array.

23. A method of making a mirror device comprising:

establishing spacer layers and patterns on a base substrate having address circuitry;

constructing elements of the mirror device on the base substrate including an address electrode and a mirror;

establishing an optically transparent substrate in sealed overlying relationship with the mirror after removal of the spacer layers; and

establishing at least one reset electrode, the reset electrode connected to the optically transparent substrate.

24. The method of claim 23 wherein the reset electrode establishing step comprises attaching an optically transparent conductive material to at least one region of the optically transparent substrate.

25. A micro-electromechanical (MEMS) device, comprising:

an optically transmissive substrate comprising an electrode;

an encapsulation membrane spaced from the substrate;

means for selectively reflecting light, the light reflecting means spaced from the substrate and positioned between the substrate and the encapsulation membrane, the light reflecting means configured to deflect from a rest position to at least one actuated position when electrostatically attracted to the electrode,

wherein the encapsulation membrane comprises means for resetting the light reflecting means to the rest position when a reset bias voltage is applied between the light reflecting means and the encapsulation membrane.

26. The micro-electromechanical (MEMS) device of claim 25, wherein the resetting means is electrically conductive material.

27. The micro-electromechanical (MEMS) device of claim 25, wherein the resetting means generates an electrostatic force that moves the light reflecting means towards the encapsulation membrane to reset the light reflecting means to the rest position.

29. (canceled)