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DIFFERENTIAL FORCE SENSOR

  • US 20110000313A1
  • Filed: 07/12/2010
  • Published: 01/06/2011
  • Est. Priority Date: 10/22/2008
  • Status: Active Grant
First Claim
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1. An apparatus for monitoring fluid flow through a fluid line having a reduced cross-section orifice along the length of the fluid line, comprising:

  • a first sense die and a second sense die positioned adjacent to one another in a common sensor package, wherein said first sense die is responsive to movement of a first flow diaphragm that is exposed to a first pressure in the fluid line upstream of the reduced cross-section orifice, and said second sense die is responsive to movement of a second flow diaphragm that is exposed to a second pressure in the fluid line downstream of the reduced cross-section orifice.

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