METHOD FOR SENSING ACCELERATION USING A TRANSLATIONAL MASS IN-PLANE MEMS ACCELEROMETER
First Claim
1. A method for sensing acceleration using an in-plane Micro Electro-Mechanical Systems (MEMS) accelerometer device, the method comprising:
- fabricating a proof mass with flex elements that constrain movement to a transverse direction in-plane parallel to the major plane of the device;
forming at least one isolated conductive coil trace within the proof mass material;
generating a magnetic flux field, the magnetic flux field being perpendicular to a major plane of a proof mass wherein the generated magnetic flux field intersects at least one section of one or more of the conductive coil traces located on the proof mass;
generating a signal representative of the in-plane position of the proof mass;
generating a drive signal based on the generated position signal;
applying a current to one or more of the conductive coil traces based on the generated drive signal to develop a Lorentz force on the proof mass that opposes the acceleration inertial force on the proof mass; and
outputting a signal based on the generated drive signal that represents the acceleration being sensed.
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Abstract
An in-plane, closed-loop Micro Electro-Mechanical Systems (MEMS) accelerometer device with improved performance. An example MEMS device includes one or more components for generating a magnetic flux field perpendicular to a major plane of the device. The device includes substrates, a proof mass, spring elements that flexibly connect the proof mass to the substrate and constrain the proof mass to translate within the major plane of the device which corresponds to a major surface of the proof mass, a plurality of conductive traces located at a position on the proof mass proximate the magnetic flux field, a plurality of conductive springs, each of the springs are electrically connected to a corresponding one of the conductive traces, and a plurality of anchor pads connected to the substrate and one of the conductive springs.
36 Citations
9 Claims
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1. A method for sensing acceleration using an in-plane Micro Electro-Mechanical Systems (MEMS) accelerometer device, the method comprising:
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fabricating a proof mass with flex elements that constrain movement to a transverse direction in-plane parallel to the major plane of the device; forming at least one isolated conductive coil trace within the proof mass material; generating a magnetic flux field, the magnetic flux field being perpendicular to a major plane of a proof mass wherein the generated magnetic flux field intersects at least one section of one or more of the conductive coil traces located on the proof mass; generating a signal representative of the in-plane position of the proof mass; generating a drive signal based on the generated position signal; applying a current to one or more of the conductive coil traces based on the generated drive signal to develop a Lorentz force on the proof mass that opposes the acceleration inertial force on the proof mass; and outputting a signal based on the generated drive signal that represents the acceleration being sensed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification