INERTIA FORCE SENSOR
First Claim
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1. An inertial sensor comprising:
- an oscillating-type angular velocity sensing element;
an IC for processing signals supplied from the angular velocity sensor; and
a package for accommodating the angular velocity sensing element and the IC via a vibration isolator,wherein the vibration isolator includes;
a plate on which the IC is placed, where the angular sensing element is layered on the IC,an outer frame disposed outside and separately from the plate for being coupled to the plate via a wiring pattern,wherein the plate is held in midair and mounted to the package via the outer frame, andwherein one of the angular velocity sensing element and the IC is electrically coupled to the wiring pattern.
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Abstract
An inertial sensor includes oscillating-type angular velocity sensing element, IC for processing signals supplied from angular velocity sensing element, capacitor for processing signals, and package for accommodating angular velocity sensing element, IC, capacitor. Element and IC are housed in package via a vibration isolator, which is formed of TAB tape, plate on which IC is placed, where angular velocity sensing element is layered on IC, and outer frame placed outside and separately from plate and yet coupled to plate via wiring pattern.
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Citations
7 Claims
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1. An inertial sensor comprising:
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an oscillating-type angular velocity sensing element; an IC for processing signals supplied from the angular velocity sensor; and a package for accommodating the angular velocity sensing element and the IC via a vibration isolator, wherein the vibration isolator includes; a plate on which the IC is placed, where the angular sensing element is layered on the IC, an outer frame disposed outside and separately from the plate for being coupled to the plate via a wiring pattern, wherein the plate is held in midair and mounted to the package via the outer frame, and wherein one of the angular velocity sensing element and the IC is electrically coupled to the wiring pattern. - View Dependent Claims (2, 3, 4, 5)
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6. An inertial sensor comprising:
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an angular velocity sensing element; a vibration isolator including; a plate for holding the angular velocity sensing element in midair and on a top face of the plate; and an outer frame coupled to the plate with a wiring pattern; an IC for processing signals supplied from the angular velocity sensing element; and a package for accommodating the angular velocity sensing element, the vibration isolator, and the IC, wherein the package includes an acceleration sensing section on inner bottom face of the package.
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7. An inertial sensor comprising:
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an angular velocity sensing element; a vibration isolator including; a plate for holding the angular velocity sensing element in midair and on a top face of the plate; and an outer frame coupled to the plate with a wiring pattern; an IC for processing signals supplied from the angular velocity sensing element; and a package for accommodating the angular velocity sensing element, the vibration isolator, and the IC, wherein an acceleration sensing section is disposed on an underside of the plate of the vibration isolator.
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Specification