DEVICE MANUFACTURING APPARATUS AND DEVICE MANUFACTURING METHOD

• US 20110059621A1
• Filed: 09/03/2010
• Published: 03/10/2011
• Est. Priority Date: 09/10/2009
• Status: Active Grant

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Yoshida, Tomohiko
• Granted Patent: US 9,256,231 B2
• Time in Patent Office: Days
• US Class Current: 438/795
• CPC Class Codes: G05D 23/1928 sensing the temperature of one space
• CPC Class Codes: H01L 21/67248 Temperature monitoring

Abstract

An apparatus for manufacturing a device comprises a temperature regulator configured to regulate a temperature of a component associated with manufacture of the device, a controller configured to control the temperature regulator, and a console configured to send command information to the controller upon receiving an input regarding an operation of the temperature regulator, the command information including a command for causing the temperature regulator to operate in an electric power saving mode, and a parameter which specifies a detail of the electric power saving mode.

Claims

1. An apparatus for manufacturing a device, comprising:

a temperature regulator configured to regulate a temperature of a component associated with manufacture of the device;

a controller configured to control the temperature regulator; and

a console configured to send command information to the controller upon receiving an input regarding an operation of the temperature regulator, the command information including a command for causing the temperature regulator to operate in an electric power saving mode, and a parameter which specifies a detail of the electric power saving mode.

2. An apparatus according to claim 1, wherein the parameter includes a parameter indicating a target temperature.

3. An apparatus according to claim 1, wherein the parameter includes a parameter indicating that temperature regulation by the temperature regulator is to be stopped in the electric power saving mode.

4. An apparatus according to claim 1, wherein

the temperature regulator includes a primary temperature regulator configured to regulate a temperature of a cooling medium, and a secondary temperature regulator configured to regulate a temperature of the cooling medium whose temperature has been regulated by the primary temperature regulator, and

the parameter includes a parameter indicating, as a target temperature of temperature regulation by the primary temperature regulator in the electric power saving mode, a target temperature which is closer to a target temperature of temperature regulation by the secondary temperature regulator in a non-electric power saving mode than a target temperature of temperature regulation by the primary temperature regulator in the non-electric power saving mode.

5. An apparatus according to claim 4, wherein the primary temperature regulator includes a heat exchanger, and the secondary temperature regulator includes a heater.

6. An apparatus according to claim 1, wherein the device manufacturing apparatus is configured as an exposure apparatus for exposing a substrate to radiant energy.

7. A method of manufacturing a device, the method comprising:

exposing a substrate to radiant energy using an exposure apparatus;

developing the exposed substrate; and

processing the developed substrate to manufacture the device,

the exposure apparatus including;

a temperature regulator configured to regulate a temperature of a component associated with exposure of the substrate;

a controller configured to control the temperature regulator; and

a console configured to send command information to the controller upon receiving an input regarding an operation of the temperature regulator, the command information including a command for causing the temperature regulator to operate in an electric power saving mode, and a parameter which specifies a detail of the electric power saving mode.