DISPLAY DEVICE WITH AT LEAST ONE MOVABLE STOP ELEMENT
First Claim
1. A device comprising:
- a substrate;
a plurality of supports over the substrate;
a mechanical layer comprising a movable portion and a stationary portion, the stationary portion disposed over the supports;
a reflective surface positioned over the substrate, the reflective surface mechanically coupled to the movable portion; and
at least one movable stop element displaced from and mechanically coupled to the movable portion, at least a portion of the stop element positioned over the stationary portion.
2 Assignments
0 Petitions
Accused Products
Abstract
In certain embodiments, a device is provided including a substrate and a plurality of supports over the substrate. The device may further include a mechanical layer having a movable portion and a stationary portion. The stationary portion may disposed over the supports. In certain embodiments, the device further includes a reflective surface positioned over the substrate and mechanically coupled to the movable portion. The device of certain embodiments further includes at least one movable stop element displaced from and mechanically coupled to the movable portion. In certain embodiments, the at least a portion of the stop element may be positioned over the stationary portion.
105 Citations
37 Claims
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1. A device comprising:
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a substrate; a plurality of supports over the substrate; a mechanical layer comprising a movable portion and a stationary portion, the stationary portion disposed over the supports; a reflective surface positioned over the substrate, the reflective surface mechanically coupled to the movable portion; and at least one movable stop element displaced from and mechanically coupled to the movable portion, at least a portion of the stop element positioned over the stationary portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A device comprising:
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means for reflecting light; first supporting means for supporting the reflecting means; second supporting means for supporting the reflecting means over the first supporting means and for moving the reflecting means relative to the first supporting means and the second supporting means comprising a movable portion and a stationary portion; and means for stopping movement of the reflecting means, the stopping means positioned over at least the stationary portion of the second supporting means. - View Dependent Claims (19, 20, 21, 22, 23)
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24. A method of manufacturing a device, the method comprising:
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forming a plurality of supports over a substrate; forming a mechanical layer over the supports comprising a movable portion and a stationary portion, the stationary portion disposed over the supports; forming a movable element over the substrate and comprising a reflective surface, the movable element mechanically coupled to the movable portion; and forming at least one movable stop element over the stationary portion, the stop element displaced from and mechanically coupled to the movable portion.
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25. A device comprising:
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a substrate; a plurality of supports over the substrate; a mechanical layer comprising a movable portion and a stationary portion, the movable portion having a first thickness, the stationary portion disposed over the supports; and a movable element positioned over the substrate, the movable element mechanically coupled to the movable portion, the movable element comprising a reflective surface and a stiffener portion, the stiffener portion positioned above the movable portion and positioned above and mechanically coupled to the reflective surface, the stiffener portion extending along a substantial fraction of the area of the reflective surface. - View Dependent Claims (26, 27, 28, 29, 30)
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31. A device comprising:
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means for reflecting light; first supporting means for supporting the reflecting means; second supporting means for supporting the reflecting means over the first supporting means and for moving the reflecting means relative to the first supporting means and the second supporting means comprising a movable portion and a stationary portion; and means for stiffening the reflecting means, the stiffening means positioned above the movable portion and positioned above and mechanically coupled to the reflecting means. - View Dependent Claims (32, 33, 34, 35, 36)
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37. A method of manufacturing a device, the method comprising:
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forming a plurality of supports over a substrate; forming a mechanical layer over the supports comprising a movable portion and a stationary portion, the stationary portion disposed over the supports; and forming a movable element positioned over the substrate, the movable element mechanically coupled to the movable portion, the movable element comprising a reflective surface; and forming a stiffener portion positioned above the movable portion and positioned above and mechanically coupled to the reflective surface, the stiffener portion extending along a substantial fraction of the area of the reflective surface.
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Specification