METHOD FOR MANUFACTURING MONOLITHIC OSCILLATOR WITH BAW RESONATORS

  • US 20110078894A1
  • Filed: 10/01/2010
  • Published: 04/07/2011
  • Est. Priority Date: 10/01/2009
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • forming a first oscillator on a substrate, the first oscillator having an output;

    forming a resonator on the substrate, the resonator being electrically coupled to the first oscillator;

    forming a frequency adjustment layer on the resonator;

    measuring an output frequency on the output of the first oscillator;

    adjusting the output frequency of the first oscillator by modifying a thickness of the frequency adjustment layer.

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